A Calculation Method for the Response of Surface Acoustic Wave Sensor with Non-uniform Load Distribution

A technology of load distribution and surface acoustic wave, applied in the direction of processing detection response signals, instruments, scientific instruments, etc., can solve problems such as difficult to meet requirements, uneven spatial distribution, and low accuracy of calculation methods

Active Publication Date: 2020-11-06
INST OF ACOUSTICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, in actual testing, the adhesion of the object to be tested is affected by various factors, and the load distribution often shows non-uniformity. For microorganisms, single cells, etc., the analyte will be attached to the surface of the sensitive area of ​​the SAW sensor in the form of point load, and there will be extremely significant spatial distribution inhomogeneity
[0004] In the mode where the load is evenly distributed in the sensitive area, the existing theoretical calculation method can achieve relatively accurate results, but for the load mode with significantly uneven distribution, the accuracy of the existing calculation method is not high, and it is difficult to meet the requirements

Method used

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  • A Calculation Method for the Response of Surface Acoustic Wave Sensor with Non-uniform Load Distribution
  • A Calculation Method for the Response of Surface Acoustic Wave Sensor with Non-uniform Load Distribution
  • A Calculation Method for the Response of Surface Acoustic Wave Sensor with Non-uniform Load Distribution

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Embodiment 1

[0111] The method of the present invention for a two-terminal-pair SAW resonator-type sensor, such as figure 2 As shown in, for double-ended resonator type SAW sensor structure comprising: reflectors * 2, both sides of the transducer IDT1, IDT3, intermediate load transducer IDT2. IDT2 intermediate load transducer as sensitive area sensor.

[0112] Example 1 Investigation case of uneven load spatial distribution embodiment, a particular case according to the actual application scenario value adjustment, in this calculation, the device is set to the total aperture 150 * Lambda (1 * Lambda = 10um), load size (adhesion area) to 10um 10um, loading effects of the radiation range to * 5 * Lambda (radius), the establishment of two-dimensional calculation model according to the above-described SAW parameters, such as image 3 Indicated.

[0113] Step1: Consider the load space SAW propagation direction (X-direction) distribution, such as Figure 4 As shown in the X direction, the sensor sensi...

Embodiment 2

[0131] Example 2 The SAW sensor such as the SAW sensor, such as the distribution of load properties, figure 2 As shown, the value of the specific case can be adjusted according to the actual application scenario, in this calculation, the total aperture of the device is 150 * lambda (1 * lambda = 10um), and the sensitive area is uniformly coated with both silica and zinc oxide. Different materials, such as Figure 8 Indicated.

[0132] Step1: Consider the spatial distribution of the load in the SAW propagation direction (X direction), in this embodiment, the load is uniformly distributed in the X direction, so it is not necessary to perform segmentation in the X direction.

[0133] Step2: Consider the space distribution of the load in the acoustic diameter direction (Y direction), such as Figure 9 and Figure 10 As shown in the Y direction, divide the SAW sensor into a portion of 2, and the number is one channel, the number is CH. 1 ~ Ch 2 In this embodiment, the parameters such as e...

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Abstract

The invention discloses a method for calculating response of a surface acoustic wave sensor with non-uniform load distribution. The method comprises the steps of dividing a sensitive area of the SAW sensor into N parts along the SAW propagation direction; dividing the SAW sensor into M channels along the acoustic aperture direction; dividing the sensitive area of the SAW sensor into M * N units; solving P matrix elements for each unit of the sensitive area of the SAW sensor and components outside the sensitive area to obtain a P matrix of each unit of the SAW sensor; cascading the N unit P matrixes of the sensitive area in each channel and the assembly P matrix outside the sensitive area along the X direction to form an admittance matrix of each channel, and then combining the admittance matrixes of each channel into an integral admittance matrix of the SAW sensor along the Y direction by utilizing an inter-channel electric end parallel relation; converting the overall admittance matrix of the device SAW sensor into a scattering matrix according to the network parameter conversion relation; and calculating the insertion loss of the device according to the scattering matrix, therebydrawing a device frequency response curve representing the sensing performance.

Description

Technical field [0001] The present invention relates to a SAW (Surface Acoustic Wave, SAW) sensor, and in particular relates to a method of calculating a non-uniform load distribution of the surface acoustic wave sensor response. Background technique [0002] SAW is one kind of sound wave mode propagation along the surface of the medium, is very sensitive to disturbances spread to the media surface, all kinds of high performance SAW sensor as a design principle has been widespread concern. [0003] Existing sensors based on SAW technology are designed with sensitive areas, the sensitive area of ​​physical absorption length is generally several tens of wavelengths, sensitive areas, chemical adsorption, physical deposition or other principles to achieve material treated acquired measured. Existing theories assume adhered within the analyte sensitive area are uniformly distributed, and therefore neglects to take the load distribution on the sensor response simulation. However, in pr...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N29/02G01N29/036G01N29/12G01N29/44
CPCG01N29/022G01N29/036G01N29/12G01N29/4472
Inventor 刘久玲游然何世堂
Owner INST OF ACOUSTICS CHINESE ACAD OF SCI
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