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A vertical cavity surface emitting laser array and its manufacturing method and application

A technology of vertical cavity surface emission and laser array, which is applied in the laser field, can solve problems such as uneven current density distribution, low conversion power, and poor consistency of light intensity distribution, and achieve improved effective light-emitting area, high energy density, high voltage and small Effect of Current Mode of Operation

Active Publication Date: 2021-09-24
VERTILITE CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the vertical cavity surface emitting laser (VCSEL) with an oxide aperture faces the problem of uneven current density distribution, resulting in low conversion power and poor consistency of light intensity distribution.

Method used

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  • A vertical cavity surface emitting laser array and its manufacturing method and application
  • A vertical cavity surface emitting laser array and its manufacturing method and application
  • A vertical cavity surface emitting laser array and its manufacturing method and application

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Embodiment Construction

[0044] Embodiments of the present invention are described below through specific examples, and those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The present invention can also be implemented or applied through other different specific implementation modes, and various modifications or changes can be made to the details in this specification based on different viewpoints and applications without departing from the spirit of the present invention.

[0045] It should be noted that the diagrams provided in this embodiment are only schematically illustrating the basic idea of ​​the present invention, and only the components related to the present invention are shown in the diagrams rather than the number, shape and shape of the components in actual implementation. Dimensional drawing, the type, quantity and proportion of each component can be changed arbitrarily during actual impleme...

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Abstract

The present invention proposes a vertical cavity surface emitting laser array and its manufacturing method and application, including at least two emitters, each of which includes at least two emitting units, and a first conductive A connection layer; at least one insulating region disposed between the at least two emitters; wherein the at least two emitters are connected in series. The vertical cavity surface emitting laser array proposed by the invention can increase the light emitting area.

Description

technical field [0001] The invention relates to the technical field of lasers, in particular to a vertical cavity surface emitting laser array and a manufacturing method and application thereof. Background technique [0002] Vertical cavity surface emitting laser (Vertical Cavity Surface Emitting Laser, VCSEL) is developed on the basis of gallium arsenide semiconductor material, which is different from other light sources such as LED (light emitting diode) and LD (Laser Diode, laser diode), with small size, The advantages of circular output spot, single longitudinal mode output, small threshold current, low price, and easy integration into large-area arrays are widely used in optical communication, optical interconnection, optical storage and other fields. [0003] The Vertical Cavity Surface Emitting Laser (VCSEL) is a new type of laser that emits light from the vertical surface. Its structure is different from the traditional edge emitting laser. It has many advantages: th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S5/183H01S5/18
CPCH01S5/18H01S5/183H01S5/18308
Inventor 丁维遵刘嵩
Owner VERTILITE CO LTD