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Gaussian beam shaping mirror, optical system and its application

A Gaussian beam and optical system technology, applied in the laser field, can solve the problems of high difficulty and high cost of processing and detection, damage to optical components, unfavorable control of mass production quality and cost, etc., to avoid excessive local temperature and processing. and the effect of low detection cost

Active Publication Date: 2021-05-11
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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Problems solved by technology

If the Kepler system is used, the beam will converge after passing through the first lens with positive refractive power, that is, there will be a real focus. If the energy of the laser is too high, the temperature at the real focus will be too high, and even the air will be ionized. High temperature can cause Damage to optical components; if the Kepler system is used, the beam will be a divergent beam after passing through the first negative aspheric lens. The difficulty and cost of processing and testing of high-degree aspheric surfaces are higher than those of positive-power aspheric surfaces, which is not conducive to the quality and cost control of mass production

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  • Gaussian beam shaping mirror, optical system and its application

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Embodiment Construction

[0022] On the one hand, the traditional shaping system mostly uses two aspheric optical systems with positive power, that is, the Kepler-type shaping system. The first aspheric lens converges the Gaussian beam before shaping it. For high output For high-power lasers, the energy at the converging point is too high, which will cause local overheating and even ionize the air; on the other hand, if the first surface of the first lens is flat, the second surface It is a high-order aspheric surface with negative refractive power, that is, a Galileo-style plastic system. Although real focus can be avoided, the processing cost of negative refractive power aspheric lenses is much higher than that of positive refractive power aspheric lenses; The production cost is high, which is not conducive to practical application.

[0023] Based on this, the present invention provides a Gaussian beam shaping mirror suitable for high-power laser processing, an optical system and its application, whi...

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Abstract

A Gaussian beam shaping mirror, an optical system and its application, the Gaussian beam shaping mirror is a meniscus lens, comprising: a beam expanding incident surface, including a concave surface, with a negative focal power, used for Gaussian beam shaping Beam expansion; shaping the exit surface, including a convex surface, with positive power, for energy distribution of the expanded Gaussian beam; wherein, the absolute value of the power of the incident surface of the beam expansion is greater than that of the shaping exit surface The absolute value of the optical power so that the Gaussian beam shaper has no real focus. The Gaussian beam shaping mirror and its optical system have no real focus, and are suitable for high-power laser processing and other fields.

Description

technical field [0001] The invention relates to the field of laser technology, in particular to a Gaussian beam shaping mirror, an optical system and applications thereof. Background technique [0002] The laser beam has the characteristic of Gaussian distribution of energy. In technical fields such as laser processing, laser welding, and biomedical engineering, the non-uniform distribution of energy will lead to local temperature rise and destroy material properties. Therefore, in many laser application fields, the uneven energy distribution of laser beams limits its application. It is necessary to convert Gaussian beams into flat-top beams with uniform energy distribution to eliminate adverse effects. The Gaussian beam shaping systems commonly used at present are mainly Kepler system and Galileo system. Aspheric lens system composition, both have certain limitations. If the Kepler system is used, the beam will converge after passing through the first lens with positive r...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B27/09
CPCG02B27/0927G02B27/0938G02B27/0955
Inventor 高瑀含张玲李冬梅唐光鑫
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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