Piezoelectric filter and its mass load realization method and device including piezoelectric filter
A quality load and filter technology, applied in the field of microelectronics, can solve the problems of deteriorating RF front-end transceiver performance, increased resonator loss, narrowing filter bandwidth, etc., to achieve improved insertion loss characteristics, good resonator loss, and improved The effect of roll-off characteristics
Active Publication Date: 2020-11-27
ROFS MICROSYST TIANJIN CO LTD
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Problems solved by technology
[0005] However, the introduction of a temperature compensation layer into the resonator is not without cost, it makes the characteristics of the resonator worse, mainly reflected in the increase of the resonator loss and the decrease of the electromechanical coupling coefficient
As the loss of the resonator increases, the insertion loss of the filter will increase accordingly, thereby increasing the loss in the RF link and deteriorating the transceiver performance of the RF front-end
The electromechanical coupling coefficient becomes smaller, the distance between the series resonant frequency and the parallel resonant frequency of the resonator is reduced, and the roll-off characteristics of the filter may be improved, but at the same time the bandwidth of the filter will also be narrowed. In most communication systems, The bandwidth of the filter is proposed according to the system requirements, and the bandwidth cannot be narrowed without limit
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[0037] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.
[0038]In order to enable those skilled in the art to better understand the content of the present invention, the inventor first briefly introduces the basic structure and performance of the temperature-compensated resonator.
[0039] Figure 1A is the electrical symbol of a piezoelectric acoustic resonator, Figure 1B is its equivalent electrical model diagram, without considering the loss item, the electrical model is simplified to L m 、C m and C 0 formed resonant circuit. According to the resonance condition, there are two ...
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The invention provides a method for realizing mass load of a piezoelectric filter, a piezoelectric filter, a duplexer, a high-frequency front-end circuit and a communication device. In this method, the piezoelectric filter includes a series branch and a parallel branch, and the series branch includes more than three bulk acoustic wave resonators connected in series between the input and output ends of the piezoelectric filter, adjacent A parallel circuit is arranged between the connection point of the resonator and the ground terminal, in this method, the temperature compensation layer of the resonator is used as a mass load, and: all series resonators are the same resonator, each series resonator has or No temperature compensation layer; all parallel resonators have a temperature compensation layer and are thicker than the temperature compensation layer of the series resonators. By adopting the technical solution of the present invention, both the left side roll-off of the filter and the optimal selection of the passband insertion loss performance are taken into account.
Description
technical field [0001] The present invention relates to the field of microelectronic technology, and relates to a piezoelectric filter and its mass load realization method and a device containing the piezoelectric filter, in particular to a method for realizing the mass load of the piezoelectric filter, a piezoelectric filter, and a duplexer , high-frequency front-end circuit and communication device. Background technique [0002] At present, the small-sized filter devices that can meet the needs of communication terminals are mainly piezoelectric acoustic wave filters. The resonators that make up this type of acoustic wave filter mainly include: FBAR (Film Bulk Acoustic Resonator, thin film bulk acoustic resonator), SMR (Solidly Mounted Resonator, solid-state assembly resonator) and SAW (Surface AcousticWave, surface acoustic wave resonator). Among them, filters based on the principle of bulk acoustic wave FBAR and SMR (collectively referred to as BAW, bulk acoustic wave r...
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IPC IPC(8): H03H9/54
CPCH03H9/54
Inventor 庞慰郑云卓
Owner ROFS MICROSYST TIANJIN CO LTD