an evaporation device

Abstract

The present invention relates to the field of evaporation technology, in particular to an evaporation device. By arranging the crucible body above the substrate, the bending of the substrate can be avoided, and the substrate and the mask can be better bonded together; since the crucible body Dust particles will be generated during evaporation and movement. Dust particles falling on the mask set on the substrate will cause plug holes in the mask and affect the coating of the substrate. A dust-proof device is installed between the crucible body and the substrate , can effectively prevent dust particles from falling onto the mask plate, and then can effectively play a dustproof role while reducing substrate bending, and improve the stability and quality of substrate coating.

Description

technical field [0001] The present invention relates to the technical field of evaporation, and in particular, to an evaporation device. Background technique [0002] Since the invention of Organic Light-Emitting Diode (OLED), it has attracted much attention in the industry. After decades of development, it has been widely used in the display field due to its thinness and flexibility. The most promising display technology. [0003] The core part of OLED is composed of multiple organic layers with different functions. The thickness of these organic layers is generally between several angstroms to several thousand angstroms, and the thickness of each layer must be precisely controlled; at present, the physical vapor deposition method is to make organic layers. The mainstream technology: heating the organic material in a vacuum chamber to vaporize or sublime the material, and deposit it on a substrate with a relatively low temperature to form a multi-layer OLED device. [000...

AI Technical Summary

Problems solved by technology

[0004] The more common practice is: the substrate is in the upper part of the vacuum chamber with the coating facing down, the crucible containing the organic material is in the lower part of the chamber, and the organic material is heated and sublimated or vaporized inside the crucible and deposited on the substrate; due to the thickness of the substrate Generally, it is within 1mm and the coated surface is facing down. It can only be supported in the non-coated area at the boundary of the substrate, and the coated area in the middle of the substrate cannot be supported, so the substrate is prone to bending under the action of gravity; in order to reduce the substrate The bending of the substrate must control the size of the substrate and maintain a relatively thick thickness, which limits the improvement of production efficiency and cost savings

Images