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Half-offline plasma treatment equipment and use method thereof

A plasma and processing equipment technology, applied in the field of plasma processing equipment, can solve problems such as limited flexibility, achieve the effects of improving processing efficiency, low transformation cost, and improving product processing efficiency

Active Publication Date: 2020-06-30
SUZHOU OPS PLASMA TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The above-mentioned plasma treatment equipment is not suitable for the plasma treatment requirements of pipeline processing products, and the flexibility of equipment installation and use is limited

Method used

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  • Half-offline plasma treatment equipment and use method thereof
  • Half-offline plasma treatment equipment and use method thereof
  • Half-offline plasma treatment equipment and use method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0048] as attached figure 1 As shown, a semi-offline plasma processing equipment includes a conveyor line frame 1 , a transport assembly 2 , a vacuum chamber 3 , a moving assembly 4 , a vacuum chuck assembly 5 and a support frame 6 .

[0049] The conveying assembly 2 is arranged above the conveying line frame 1 , and the conveying assembly 2 is used for conveying the workpiece pallet 8 .

[0050] The power assembly is arranged above the support frame 6 , and the power assembly is used to drive the vacuum chuck assembly 5 to move up and down, left and right.

[0051] as attached figure 2 As shown, the vacuum chamber 3 includes a cavity body 301 and an upper cover 302, and the cavity body 301 and the upper cover 302 are fixedly connected by connecting rods.

[0052] Further, the connecting rod includes a long connecting rod 303 and a short connecting rod 304 , and the two ends of the long connecting rod 303 and the short connecting rod 304 are respectively fixed on one side o...

Embodiment 2

[0073] Based on the above-mentioned embodiment 1, a method for using a semi-offline plasma processing equipment includes the following steps:

[0074] S1, the transmission motor 203 is turned on, and the workpiece tray 8 is transmitted through the first transmission component, that is, the feeding end, and is transmitted on the transmission belt 202;

[0075] S2, the vacuum chamber 3 is opened, the power assembly drives the vacuum chuck assembly 5 to move up and down, left and right, at the same time, the vacuum chuck assembly 5 sucks the workpiece tray 8 and places it in the cavity 301, the vacuum chuck assembly 5 returns to its position, and the upper cover 302 is closed, vacuumized for plasma treatment;

[0076] Specifically, the X-axis power assembly 401 drives the left and right movement of the vacuum chuck assembly 5 by driving the moving frame 423 to move left and right; the Z-axis power assembly 402 drives the vacuum chuck assembly 5 to move up and down by driving the ...

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Abstract

The invention relates to half-offline plasma treatment equipment and a use method thereof. The treatment equipment comprises a conveyor line machine frame, a transmission assembly, a vacuum cavity, amotion assembly, a vacuum sucker assembly and a supporting frame; the transmission assembly is arranged above the conveyor line and is used for transmitting workpiece trays; a power assembly is arranged above the supporting frame and is used for driving the vacuum sucker assembly to move up and down and left and right; and the vacuum sucker assembly is used for grabbing and placing the workpiece trays. The use method is simple to operate, convenient to use and high in applicability. According to the half-offline plasma treatment equipment and the use method thereof, the defects that existing plasma treatment equipment is mostly of a fixed case structure, has poor flexibility and cannot adapt to the flow line production of products are overcome and flow line plasma treatment is realized; meanwhile, the requirement on the transformation of the product processing flow line equipment is met, the plasma treatment efficiency is improved and the applicability and flexibility of the equipmentare improved.

Description

technical field [0001] The invention relates to the technical field of plasma processing equipment, in particular to a semi-offline plasma processing equipment and a method for using the same. Background technique [0002] Plasma is different from solid, liquid and gas. It is the fourth state of matter. Plasma is also called plasma. substance. [0003] Plasma technology has very significant advantages in many fields. In terms of surface modification of materials, it has the advantages of low cost, no waste, and no pollution; It has the advantages of short sterilization time and no environmental pollution; it has the advantages of low energy consumption, high efficiency, short treatment process and wide application range in the treatment of various pollutants (waste gas, wastewater). [0004] Most of the existing production and processing equipment are pipeline-type online processing. If plasma treatment is required for the products processed by the existing pipeline, the p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G47/91
CPCB65G47/912
Inventor 沈文凯檀靓刘鑫培王红卫
Owner SUZHOU OPS PLASMA TECH
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