Antireflection film cleaning and reusing device and cleaning method

Abstract

The invention discloses an antireflection film cleaning and reusing device and belongs to the technical field of antireflection film cleaning devices. By placing an antireflection film and a substrateoptical component vertically in a vacuum chamber by using a clamp, one end of the vacuum chamber is sealed by a blind plate while the other end of the vacuum chamber is sealed by quartz glass. A vacuum unit is started, and a vacuum pump reduces air pressure in a cavity to a preset value quickly, so that the vacuum degree in the chamber meets a plasma generation condition, and therefore, proper reaction gas such as oxygen and argon is introduced from an inflating end. Electrodes distributed in the cavity in an encircling manner are controlled by a plasma generator to generate a plasma field, and the plasma is acted to the optical component and the antireflection film on the surface of the optical component, so that a service purpose that organic pollutants on the surface of the antireflection film of the film are removed is achieved finally.

Description

technical field [0001] The invention relates to an anti-reflection film cleaning and multiplexing device, in particular to an anti-reflection film cleaning device for optical elements, belonging to the technical field of optical elements and anti-reflection film cleaning devices. Background technique [0002] Anti-reflection coatings are mainly used to reduce the reflection loss of light energy on the surface of optical components. Usually, a layer of transparent medium film with a refractive index lower than that of the substrate is coated on the light-transmitting surface of the optical element surface. Using the principle of light interference, the reflected light of the incident light on the upper and lower surfaces of the film interferes and cancels, thereby making the reflection The light energy decreases, and the transmitted light energy increases relatively. There are two methods commonly used at present, namely physical method and chemical method. The chemical sol...

AI Technical Summary

Problems solved by technology

Since the structure of the chemical sol-gel anti-reflection film is loose and porous, and the surface contains a large amount of silanol, it is easy to absorb moisture and organic matter in the environment when used in a high-vacuum environment, thereby reducing the optical performance and laser damage resistance.

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