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A kind of nanometer pressure sensor and preparation method thereof

A pressure sensor, nanotechnology, applied in the field of sensors, can solve the problems of poor sensitivity and affect the user experience, and achieve the effects of high sensitivity, reduced pressure threshold, and simple preparation

Active Publication Date: 2022-04-15
ZHENGZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, pressure resistance pressure sensors need a sufficiently large pressure threshold (≥100kPa) to work, resulting in poor sensitivity, which will seriously affect the user experience in touch screen and other applications

Method used

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  • A kind of nanometer pressure sensor and preparation method thereof
  • A kind of nanometer pressure sensor and preparation method thereof
  • A kind of nanometer pressure sensor and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] The nano pressure sensor of the present embodiment is as figure 1 As shown, it consists of two conductive substrates 1 and a nano-functional layer 2 between the two conductive substrates 1, and the nano-functional layer 2 covers the surface of one of the conductive substrates 1; the nano pressure sensor It belongs to the resistive pressure sensor.

[0023] The nano functional layer 2 is a two-dimensional nano film; the two-dimensional nano film is a discontinuous semiconductor or a discontinuous insulator material.

[0024] The two-dimensional nano film is a titanium oxide nano sheet film.

[0025] The conductive substrate 1 is a PET / ITO sheet; ITO / PET is formed by coating a layer of ITO conductive material on a flexible PET material, which is low in cost and deformable; the conductive substrate 1 in this embodiment can also be an ITO glass sheet or FTO glass sheet.

[0026] This embodiment also provides a method for preparing the above-mentioned nano pressure sensor...

Embodiment 2

[0042] The nano pressure sensor of the present embodiment is as figure 1 As shown, it consists of two conductive substrates 1 and a nano-functional layer 2 between the two conductive substrates 1, and the nano-functional layer 2 covers the surface of one of the conductive substrates 1; the nano pressure sensor It belongs to the resistive pressure sensor.

[0043] The nano functional layer 2 is a two-dimensional nano film; the two-dimensional nano film is a discontinuous semiconductor or a discontinuous insulator material.

[0044] The two-dimensional nano film is a niobium oxide nano sheet film.

[0045] The conductive substrate 1 is a PET / ITO sheet; ITO / PET is formed by coating a layer of ITO conductive material on a flexible PET material, which is low in cost and deformable; the conductive substrate 1 in this embodiment can also be an ITO glass sheet or FTO glass sheet.

[0046] This embodiment also provides a method for preparing the above-mentioned nano pressure sensor,...

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Abstract

The invention provides a nano pressure sensor, which comprises two conductive substrates and a nano functional layer between the two conductive substrates, the nano functional layer covers the surface of one of the conductive substrates, and also provides a preparation method, the Nanomaterials are covered on the surface of the conductive substrate by nanotechnology to form a nanofunctional layer, the conductive substrate covered with the nanofunctional layer is assembled with the conductive substrate not covered with the nanofunctional layer, and the nanofunctional layer is sandwiched between the two conductive substrates to obtain Nano pressure sensor. Get the nano pressure sensor. The nano pressure sensor of the present invention has high sensitivity in the low pressure area, is constructed based on nano materials, can greatly reduce the pressure threshold of the resistive pressure sensor, and has the advantages of high sensitivity and simple preparation. Skin, Internet of Things and other fields have broad application prospects.

Description

technical field [0001] The invention belongs to the technical field of sensors, and in particular relates to a nanometer pressure sensor and a preparation method thereof. Background technique [0002] Pressure sensor is a widely used electronic component, and its application involves transportation, water conservancy, aerospace and many other industries. With the development of emerging technologies such as the Internet of Things, wearable smart devices, and robots, people's requirements for miniaturization, high flexibility, and high sensitivity of pressure sensors continue to increase. At present, pressure resistance pressure sensors require a sufficiently large pressure threshold (≥100kPa) to work, resulting in poor sensitivity, which will seriously affect the user experience in touch screen and other applications. Even though resistive pressure sensors have the advantages of low power consumption and simple preparation, due to the above shortcomings, the application of ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/22B82Y15/00B82Y40/00C03C17/34
CPCG01L1/22B82Y15/00B82Y40/00C03C17/3417
Inventor 原会雨刘睿超孙启军刘皓崔俊艳高金星杨道媛
Owner ZHENGZHOU UNIV
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