Electromagnetic driving type MEMS micro-mirror and manufacturing method thereof

Abstract

The invention discloses an electromagnetic driving type MEMS micro-mirror. The MEMS micro-mirror comprises a transparent upper cover, a heat-conducting base, the micro-mirror and a solenoid. An uppercover covers an upper surface of the base and forms a vacuum cavity with the base, the micro-mirror is fixed and contained in the cavity and comprises a frame, a reflecting mirror and a magnet, the reflecting mirror is fixed in the frame, the solenoid is fixed in the base, a top end of the solenoid and the reflecting mirror are arranged at intervals, and the magnet is fixed to a back surface of the reflecting mirror and used for driving the reflecting mirror to twist relative to the frame under the action of an energized solenoid. By using the electromagnetic driving type MEMS micro-mirror, adriver integrated on a micro-mirror chip is a magnet, heat is not generated, the MEMS micro-mirror can still adopt a vacuum type packaging structure, can dissipate heat quickly, and can effectively avoid a heating problem caused by a fact that a vacuum packaging mode affects normal work of a device, and electric connection is not needed in the vacuum cavity so that air tightness of a packing device is not affected, and performance of the electromagnetic driving type MEMS micro-mirror can be improved.

Description

technical field [0001] The invention relates to the field of micro-electromechanical technology, in particular to an electromagnetically driven MEMS micromirror and a manufacturing method thereof. Background technique [0002] In the solid-state lidar based on MEMS (Micro-Electro-Mechanical System, micro-electromechanical system) micromirror technology, it usually includes the use of coaxial and non-coaxial optical paths to detect objects at long distances, while the same In axis scanning, both the emitted light and the received light pass through the MEMS micromirror, which requires the MEMS micromirror to have a larger mirror surface. However, since the large mirror micromirror itself has a large amount of inertia, a greater driving force is required to make the micromirror achieve a larger scanning angle of view. The effective diameter of the relatively mature large-diameter galvanometer on the market does not exceed 8mm. [0003] In order to obtain a large-sized vibrati...

AI Technical Summary

Problems solved by technology

In the existing electromagnetic drive technology of the MEMS scanning micromirror, since one or more groups of closed coils are integrated on the movable chip of the MEMS micromirror, in a vacuum state, although the damping of the vibrating mirror is very small, the energy utilization rate can be improved. However, the heat generated by the coil in the vacuum insulation environment will be difficult to transfer and transfer, which is not conducive to the heat dissipation of the structure. As the heat continues to accumulate, it will affect the intrinsic frequency of the chip, and even the long-term high temperature environment will lead to the failure of the device structure.

At the same time, it is necessary to consider the connection channel between the electrical signal on the MEMS device and the external electrical signal when packaging, which is likely to cause poor airtight packaging effect, thus hindering the application of vacuum packaging technology for electromagnetic MEMS micromirrors

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