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Electro-acoustic resonator device and method of manufacturing thereof

A resonator, electro-acoustic technology, applied in electrical components, impedance networks, etc., can solve problems such as changes in electro-acoustic behavior, affecting the electrical parameters and reliability of devices, and sticking of metal materials of electrodes, and achieves good thermal contact effect.

Pending Publication Date: 2020-07-17
RF360新加坡私人有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the increased temperature of these components may affect the electrical parameters and reliability of the device
For example, an increase in the temperature of the electrodes may make the metallic material of the electrodes viscous and may increase ohmic losses in the electrodes such that their electroacoustic behavior may change with increasing temperature
In addition, an increase in the temperature of the piezoelectric layer may increase the electrical and acoustic losses in the piezoelectric layer
Also, localized hot spots in the material may cause mechanical damage to such layers due to material migration
Due to the heat generated in the BAW resonator during operation of the BAW resonator, electrical parameters such as the resonant frequency and frequency bandwidth of the BAW resonator may be affected and may be shifted so that, for example, the specifications of the RF filter may change Beyond the specifications of mobile devices

Method used

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  • Electro-acoustic resonator device and method of manufacturing thereof
  • Electro-acoustic resonator device and method of manufacturing thereof
  • Electro-acoustic resonator device and method of manufacturing thereof

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Embodiment Construction

[0029] Both the foregoing general description and the following detailed description are exemplary only, and are intended to provide an overview or framework for understanding the nature and character of the claims.

[0030] figure 1 The electroacoustic resonator device can be a solidly mounted resonator bulk acoustic wave device (BAW-SMR). The device is mounted on a substrate 100 as its underlying layer. Suitable substrates can be made from a variety of materials. In one embodiment, the substrate may be made of doped crystalline silicon. Doping makes silicon essentially non-conductive.

[0031] The BAW device includes an electroacoustic resonator including a bottom electrode 121 and a top electrode 122 with a piezoelectric layer 130 disposed therebetween. The top electrode and the bottom electrode may each be made of a metal layer. The metal layer may be made of tungsten (W) or a tungsten alloy. The piezoelectric layer 130 is made of a piezoelectric material. In this e...

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Abstract

An electro-acoustic resonator device comprises a substrate (100), bottom and top electrodes (121, 122), and a piezoelectric layer (130) disposed therebetween. A bragg mirror element (110) is disposedbetween the bottom electrode and the substrate. A thermally conductive material comprises amorphous or polycrystalline aluminum nitride (150, 151, 155) that contacts the piezoelectric layer and the substrate to form a thermally conductive path to sink heat generated in the acoustically active region of the resonator device during its operation.

Description

technical field [0001] The present invention relates to an electroacoustic device and a manufacturing method thereof. In particular, the present invention relates to an electroacoustic resonator device having a piezoelectric layer disposed between a top electrode and a bottom electrode and a Bragg mirror element disposed therebelow. Background technique [0002] Electroacoustic devices convert electrical signals into acoustic signals and vice versa. In an electroacoustic resonator device, an electrical signal is supplied to electrodes sandwiching a piezoelectric layer therebetween. An acoustic resonance wave is established between the electrodes, and the acoustic resonance wave performs a filtering function in the low loss and high selectivity electrical domain. Electroacoustic resonator devices are commonly used in filter designs for mobile electronic devices such as cellular phones or smart phones. The interplay of electrical and acoustic operation allows devices to be ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H03H9/02H03H9/10H03H9/17H03H3/02H10N30/01H10N30/20
CPCH03H3/02H03H9/02102H03H9/1007H03H9/175H03H2003/025
Inventor M·希克B·巴德
Owner RF360新加坡私人有限公司
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