Vacuum arc plating device for shortening cooling time of target material

Abstract

The invention discloses a vacuum arc plating device for shortening the cooling time of a target material, and belongs to the technical field of coating layers. The vacuum arc plating device for shortening the cooling time of the target material comprises a base, a mounting seat, the target material and a pipeline, wherein the base is provided with a through hole, the mounting seat is a cylinder with the sealed top, the bottom of the mounting seat is connected with the base, an inner cavity of the mounting seat communicates with the through hole, the target material is arranged on the outer side of the mounting seat in a sleeving mode, a low-melting conductive filling layer is arranged between the target material and the outer side wall of the mounting seat, and the pipeline extends into the inner cavity of the mounting seat from the through hole. According to the vacuum arc plating device, when vacuum arc plating is carried out, an high-energy arc can continuously discharge, and cooling water can continuously and rapidly take away generated heat, so that the cooling time of the target material is shortened, local melting of the target material is avoided, then the target material is prevented from being deposited on a workpiece in a droplet mode, and the performance and quality of a coating layer are improved.

Description

technical field [0001] The invention relates to the technical field of coating, in particular to a vacuum arc plating device for reducing the cooling time of a target. Background technique [0002] Vacuum arc plating refers to the process of using the principle of field emission and cathode discharge to vaporize and ionize the metal elements of the cathode target through the arc discharge energy, and then accelerate the deposition to the surface of the part under the action of negative bias voltage of the electric field to form a coating layer. method. According to the different proportions of the selected target material and the composition of the auxiliary atmosphere, various heat-resistant, corrosion-resistant, wear-resistant and decorative coatings can be coated. It has been widely used in aerospace, automobile manufacturing, abrasive tool processing and other fields. [0003] Currently limited by the process characteristics of thin-walled targets that are easily deform...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a vacuum arc plating device for reducing the cooling time of the target, so as to solve the problem of poor coating quality and poor coating quality of the workpiece caused by reducing the target temperature in the existing vacuum arc plating through the cycle intermittent production mode. long time problem

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