Micro dynamic pressure sensor detection system based on MEMS technology

A dynamic pressure and detection system technology, applied in the field of sensor detection, can solve the problems of low detection accuracy of sensors and adjustment of detection environment, etc., to achieve the effect of improving detection efficiency, improving measurement accuracy and avoiding deviation

Active Publication Date: 2020-07-28
东营金慧科技咨询有限公司
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  • Abstract
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Problems solved by technology

[0005] For this reason, the present invention provides a micro dynamic pressure sensor detection system based on MEMS technology to overcome the problem in the prior art that the detecti

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  • Micro dynamic pressure sensor detection system based on MEMS technology
  • Micro dynamic pressure sensor detection system based on MEMS technology
  • Micro dynamic pressure sensor detection system based on MEMS technology

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Embodiment Construction

[0054] In order to make the objects and advantages of the present invention clearer, the present invention will be further described below in conjunction with the examples; it should be understood that the specific examples described here are only for explaining the present invention, and are not intended to limit the present invention.

[0055] Preferred embodiments of the present invention are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principle of the present invention, and are not intended to limit the protection scope of the present invention.

[0056] It should be noted that, in the description of the present invention, terms such as "upper", "lower", "left", "right", "inner", "outer" and other indicated directions or positional relationships are based on the terms shown in the accompanying drawings. The direction or positional relationship shown is ...

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Abstract

The invention relates to a micro dynamic pressure sensor detection system based on an MEMS technology. The micro dynamic pressure sensor detection system comprises a box body, air supply units, a fixing unit, a detection unit, a hinge, a box door, an observation window, a knob and a central control unit. The air supply units are arranged at the top of the box body; the air inlet ends of the air supply units are respectively connected with air storage tanks in which corresponding air is stored; when the parameters of the sensor to be detected are detected, corresponding types of gas can be selected according to actual conditions and introduced into the box body so as to simulate the actual working environment of the sensor; the deviation of different gas environments during detection can beeffectively avoided; and meanwhile, the system can select different detection standards according to the specific working environment of the sensor to be detected, i.e., different detection pressureranges are used for carrying out targeted detection on the sensor to be detected, so that the detection efficiency of the system is improved.

Description

technical field [0001] The invention relates to the technical field of sensor detection, in particular to a micro dynamic pressure sensor detection system based on MEMS technology. Background technique [0002] A pressure sensor is a device or device that can sense pressure signals and convert the pressure signals into usable output electrical signals according to certain rules. A pressure sensor is usually composed of a pressure sensitive element and a signal processing unit. According to different test pressure types, pressure sensors can be divided into gauge pressure sensors, differential pressure sensors and absolute pressure sensors. Pressure sensors are the most commonly used sensors in industrial practice. They are widely used in various industrial automatic control environments, involving water conservancy and hydropower , railway transportation, intelligent building, production automation, aerospace, military industry, petrochemical, oil well, electric power, shi...

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Application Information

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IPC IPC(8): G01L25/00G01L27/00
CPCG01L25/00G01L27/00
Inventor 张凯
Owner 东营金慧科技咨询有限公司
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