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Ultraviolet detector and preparation method thereof

An ultraviolet detector and substrate technology, applied in the field of photoelectric detection, achieves the effects of simple preparation process, good stability and repeatability, and strong light response

Inactive Publication Date: 2020-08-28
苏州镓敏光电科技有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

Especially when working in extreme harsh conditions or long-term unattended conditions that cannot provide continuous energy for the UV detector

Method used

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  • Ultraviolet detector and preparation method thereof

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Embodiment Construction

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0026] see figure 1 , the present invention provides a technical solution:

[0027] A preparation method of an ultraviolet detector, comprising the following steps:

[0028] 1) Clean the ITO substrate: Take a 1cm×1cm ITO substrate, clean it with acetone, absolute ethanol, and deionized water for 10 minutes, and dry it for use.

[0029] 2) ITO substrate pretreatment: put the dried ITO substrate into a vacuum chamber, and sputter a layer of ZnO film on the ITO...

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Abstract

The invention discloses an ultraviolet detector and a preparation method thereof. The preparation method of the detector comprises the steps of cleaning an ITO substrate, pretreating the ITO substrate, generating a ZnO nanorod array, preparing TiO2 nanotubes and preparing the detector. The ultraviolet detector can detect ultraviolet light under the condition of no external bias voltage and has theadvantages of being high in detection speed, simple in process, low in cost and the like.

Description

technical field [0001] The invention relates to the technical field of photoelectric detection, in particular to an ultraviolet detector and a preparation method thereof. Background technique [0002] As a new, practical and promising detection technology, ultraviolet detection technology has been widely used in many civil and military fields, such as chemical analysis, missile detection, flame detection, optical communication and so on. [0003] With the increasing demand for ultraviolet detectors, not only ultraviolet detectors with high sensitivity and fast response are required, but also their performance is stable and they can be recycled. Especially in the case of extreme harshness or long-term unattended operation that cannot provide continuous energy for the UV detector. Contents of the invention [0004] The object of the present invention is to provide an ultraviolet detector and its preparation method, which can detect ultraviolet light without external bias vo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/101H01L31/0352H01L31/0236H01L31/18
CPCH01L31/02366H01L31/035272H01L31/101H01L31/18Y02P70/50
Inventor 陆海周东唐起
Owner 苏州镓敏光电科技有限公司