Deep-hole processing device for semiconductor material

Abstract

The invention discloses a deep-hole processing device for a semiconductor material. The deep-hole processing device for the semiconductor material structurally comprises a machine body, an installation head, a deep-hole drilling bit, a workbench, a base, a nut lifting seat and a screw, wherein the base is connected with the machine body through the screw; the nut lifting seat is connected to the screw; the nut lifting seat is connected to the workbench; and the deep-hole drilling bit is arranged above the workbench. Compared with the prior art, the deep-hole processing device for the semiconductor material has the following beneficial effects: the deep-hole processing device for the semiconductor material has a function of shock absorption, and is capable of reducing vibration generated during deep-hole processing and avoiding influence on the straightness of the deep-hole processing, conducive to increasing the accuracy of the deep-hole processing, and capable of rapidly changing a drilling tool; and the drilling tool is installed in a clamping manner, stable clamping is achieved, the loosening of a tool body due to the influence of rotation during the deep-hole processing is effectively prevented, and the cracking of a pedestal can also be avoided.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a deep hole processing device for semiconductor materials. Background technique [0002] Semiconductor material is a kind of electronic material with semiconductor properties that can be used to make semiconductor devices and integrated circuits. When deep hole processing is carried out, semiconductor materials are mostly processed by deep hole drilling machines. Due to the limitation of the diameter of the tool holder, the diameter is small and the length Large, resulting in poor rigidity, low strength, easy to generate vibration during deep hole processing, which easily affects the straightness of the deep hole, making the deep hole processing rough, and the vibration is easy to cause damage to the drill, so the drill needs to be replaced. Most of the existing drills are installed through screw thread rotation connection. Since the drill is in a rotating state during dee...

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Problems solved by technology

[0002] Semiconductor material is a kind of electronic material with semiconductor properties that can be used to make semiconductor devices and integrated circuits. When deep hole processing is carried out, semiconductor materials are mostly processed by deep hole drilling machines. Due to the limitation of the diameter of the tool holder, the diameter is small and the length Large, resulting in poor rigidity, low strength, easy to generate vibration during deep hole processing, which easily affects the straightness of the deep hole, making the deep hole processing rough, and the vibration is easy to cause damage to the drill, so the drill needs to be replaced. Most of the existing drills are installed through screw thread rotation connection. Since the drill is in a rotating state during deep hole machining, if the rotation direction is the same as the thread rotation direction, it is easy to make the drill loose. If the rotation direction is opposite to the thread rotation direction , it is easy to make the drill bit rotate too much and cause the installation base to crack

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