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Method for acquiring relative loss value of bonding surface of bonding lath

An acquisition method and bonding surface technology, which is applied in the field of quality inspection of laser-bonded crystal slabs, can solve problems such as lack of laser slabs, achieve the effects of improving measurement accuracy and stability, measuring accuracy, and reducing detection difficulty

Active Publication Date: 2020-09-04
HARBIN ENG UNIV
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Problems solved by technology

However, there is currently a lack of application research and development for laser slab testing, especially for the detection of bonding quality. This invention is based on optical fiber white light interferometry technology, especially the traceability advantages of spot distributed detection, and develops a distribution of bonded slabs. A new type of bonding surface quality characterization parameter is proposed, which reduces the technical difficulty and cost of detection, and provides quantitative data support for the development of high-power lasers

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  • Method for acquiring relative loss value of bonding surface of bonding lath
  • Method for acquiring relative loss value of bonding surface of bonding lath

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Embodiment Construction

[0019] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0020] The present invention includes:

[0021] 1. Preliminary evaluation of the size, type, and absorption spectrum of the strip to be tested, and debugging of the interferometric system;

[0022] Clarify the measurement depth of the crystal to provide debugging standards for the scanning delay line; clarify the absorption spectrum of the doped part of the crystal, provide a reference when selecting the wavelength of the light source, and effectively avoid the absorption peak; clarify the bonding structure, including the number of bonding layers and the depth of the bonding surface Coarse positioning, this patent takes the common double-layer bonding structure as the research object, and does not carry out packaging, coating or integration.

[0023] 2. Use the white light interference system to test the standard reflective surface w...

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Abstract

The invention provides a method for acquiring a relative loss value of a bonding surface of a bonding lath, and belongs to the field of quality detection of laser bonding crystal laths. The method comprises the following steps: firstly, acquiring a return loss proofreading value of a white light interference device by using a standard reflecting surface with known reflectivity; scanning and testing the depth direction of a vertical bonding surface in the to-be-tested lath through a delay line structure of an interferometer, and obtaining a distributed interference intensity signal of each reflecting surface and the depth positioning of the bonding surface; furthermore, using a known reflectivity film in the probe as a standard, converting the interference signal into a distributed result of reflectivity, and calibrating a measurement result by combining a loss calibration value of a standard reflecting surface; converting the surface reflectance measurement result into the refractive index of the crystal by using a Fresnel reflection formula, and further calculating a Fresnel reflectance theoretical value required by bonding surface treatment; and finally, comparing a reflectivitymeasurement value of the bonding surface with a Fresnel reflectivity theoretical value to obtain a relative loss value of the bonding surface so as to evaluate the quality of the bonding surface.

Description

technical field [0001] The invention relates to a method for obtaining the relative loss value of the bonded surface of a bonded strip, belonging to the field of quality detection of laser-bonded crystal strips. Background technique [0002] Laser bonded slabs prepared by thermal diffusion bonding can improve laser thermal performance and beam quality in terms of laser technology, and at the same time facilitate the integration of laser systems and the acquisition of large-size crystal slabs. The diffusion bonding method originated from semiconductor processing technology, and Lee et al [Proc.SPIE.1992,1624:2-10.] were the first to apply it to the preparation of composite laser crystal slabs. With the rapid development of high-power lasers, the quality requirements for bonded crystals are getting higher and higher, especially the bonding quality of the bonding surface. The current detection technology mainly revolves around the following points: Tsunekane et al [IEEEJournal...

Claims

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Application Information

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IPC IPC(8): G01N21/55
CPCG01N21/55
Inventor 张建中马占宇柴全苑勇贵王钢王超
Owner HARBIN ENG UNIV
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