Tunneling type acceleration sensor, accelerometer comprising same and application

A technology of acceleration sensor and accelerometer, which is applied in the direction of measuring acceleration, velocity/acceleration/impact measurement, acceleration measurement using inertial force, etc. It can solve the problems of structural shape change of sensitive components, electromigration of acceleration sensor, and decrease in sensitivity of accelerometer, etc. , to achieve the effect of reducing electromigration, improving service life and improving stability

Inactive Publication Date: 2020-09-22
SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the sensitive elements of existing common silicon-based MEMS accelerometers are generally made of gold and silicon-based materials. The local current of the sensitive element in the tunneling accelerometer is very large, and gold and silicon-based materials are prone to Electromigration occurs, resulting in changes in the structural shape of the sensitive element, which in turn leads to a decrease in sensitivity or failure of the accelerometer
[0005] Therefore, it is necessary to develop a new acceleration sensor and accelerometer, so as to alleviate the problem of electromigration in the existing acceleration sensor under the action of a huge current for a long time

Method used

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  • Tunneling type acceleration sensor, accelerometer comprising same and application
  • Tunneling type acceleration sensor, accelerometer comprising same and application
  • Tunneling type acceleration sensor, accelerometer comprising same and application

Examples

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Embodiment 1

[0063] This embodiment provides a tunneling type acceleration sensor, such as figure 1 and figure 2 As shown, the sensor includes a silicon dioxide base 1 and a graphene movable mechanical part 2 fixedly arranged through a photoresist 3 at one end of the silicon dioxide base 1, and the graphene movable mechanical part 2 has only one end is the fixed part, and the other parts are movable parts, and the fixed part is fixed on one end of the silicon dioxide base 1 .

[0064] Between the silicon dioxide base 1 and the graphene movable mechanical part 2, on the silicon dioxide base 1 along one end of the fixed part where the graphene movable mechanical part 2 is arranged, a source 4 and a drain are sequentially arranged. Pole 5 and gate 6; The source 4 is connected to the movable part of the graphene movable mechanical part 2, and the base is provided with a tunnel tip at the drain 5, so that the drain 5 is connected to the graphene movable mechanical There are tunneling joints ...

Embodiment 2

[0067] This embodiment provides a tunneling type acceleration sensor, such as image 3 As shown, the sensor includes a silicon dioxide base 1 and a graphene movable mechanical part 2 fixedly arranged through a photoresist 3 at one end of the silicon dioxide base 1, and the graphene movable mechanical part 2 has only one end is the fixed part, and the other parts are movable parts, and the fixed part is fixed on one end of the silicon dioxide base 1 .

[0068] Between the silicon dioxide base 1 and the graphene movable mechanical part 2, on the silicon dioxide base 1 along one end of the fixed part where the graphene movable mechanical part 2 is arranged, a source 4 and a drain are sequentially arranged. Pole 5 and gate 6; The source 4 is connected to the movable part of the graphene movable mechanical part 2, and the base is provided with a tunnel tip at the drain 5, so that the drain 5 is connected to the graphene movable mechanical There are tunneling joints 7 between the c...

Embodiment 3

[0071] This embodiment provides a tunneling type acceleration sensor, such as Figure 4 As shown, the sensor includes a silicon dioxide base 1 and a graphene movable mechanical part 2 fixedly arranged through a photoresist 3 at one end of the silicon dioxide base 1, and the graphene movable mechanical part 2 has only one end is the fixed part, and the other parts are movable parts, and the fixed part is fixed on one end of the silicon dioxide base 1 .

[0072] Between the silicon dioxide base 1 and the graphene movable mechanical part 2, on the silicon dioxide base 1 along one end of the fixed part where the graphene movable mechanical part 2 is arranged, a source 4 and a drain are sequentially arranged. Pole 5 and gate 6; The source 4 is connected to the movable part of the graphene movable mechanical part 2, and the base is provided with a tunnel tip at the drain 5, so that the drain 5 is connected to the graphene movable mechanical There are tunneling joints 7 between the ...

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Abstract

The invention provides a tunneling type acceleration sensor. According to the tunneling type acceleration sensor, a graphene movable mechanical part is adopted, compared with an existing gold materialor silicon-based material, the electromigration phenomenon in the tunneling type acceleration sensor can be better reduced, due to the fact that the graphene material is small, the size of the acceleration sensor can be further reduced, and the application range of the acceleration sensor is enlarged. Meanwhile, the sensor comprehensively adopts a single-side S-shaped double-cantilever structure,and has the advantages of high sensitivity and high anti-seismic property.

Description

technical field [0001] The invention relates to the technical field of graphene application, in particular to a tunneling type acceleration sensor, an accelerometer including the same and an application thereof. Background technique [0002] MEMS (Micro-Electro-Mechanical Systems) is a multidisciplinary cutting-edge scientific research field based on microelectronics technology in recent years. After just 40 years of development and research, MEMS has become one of the important scientific and technological research fields attracting worldwide attention. It covers a wide range of technologies and disciplines, including mechanics, materials science, electronics, chemistry, biology, physics and medicine, and has broad application prospects and research potential. Among the various pressure sensors, acceleration sensors, temperature and humidity sensors and other sensors produced in various fields in the world, the sensors belonging to the MEMS field occupy a considerable prop...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/08
CPCG01P15/0894G01P2015/0862
Inventor 宋学锋严与星李成
Owner SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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