Controllable light beam diverter based on phase-change material
A technology of phase change material and diverter, applied in instruments, optics, nonlinear optics, etc., can solve the problems of aluminum melting, device polarization sensitivity, and large phase change material layer area.
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[0021] With silicon dioxide as the substrate, it is mainly composed of three parts: the lower electrodes arranged in parallel in the horizontal direction, the phase change material layer in the cross region, and the upper electrode layer arranged in the vertical direction. The upper and lower electrodes are separated by silicon dioxide. First deposit a layer of ITO on the silicon dioxide substrate, and use electron beam exposure and etching process to form the lower electrode arranged laterally; then deposit the silicon dioxide layer and perform etching to form the phase change material through hole; then deposit the phase change material , to planarize the surface; then deposit a layer of ITO on the surface, and form vertically arranged upper electrodes by electron beam exposure and etching.
[0022] figure 2 It is a schematic diagram of the working principle of the device structure of the present invention. The light beam is incident from below the silicon dioxide substrat...
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