Adsorption tower for preparing high-purity tungsten hexafluoride

Abstract

The invention relates to an adsorption tower for preparing high-purity tungsten hexafluoride, and belongs to the technical field of tungsten hexafluoride preparation. The adsorption tower comprises anadsorption tower body, an adsorbent, a feeding mechanism and a discharging mechanism, and can further comprise at least one of a stirring mechanism, a cyclic utilization mechanism and a cleaning mechanism. A baffle net and a filter screen are sequentially arranged in the adsorption tower body from top to bottom; the baffle net is filled with adsorbent particles capable of adsorbing HF; filter screen for filtering granular impurities, the feeding mechanism is used for adding new adsorbent particles into the adsorption tower body; the discharging mechanism is used for discharging adsorbent particles with high utilization rate at the bottom of the adsorbent filled on the baffle net, the stirring mechanism is used for stirring the adsorbent particles filled on the baffle net, the cyclic utilization mechanism is used for desorbing the discharged adsorbent particles for cyclic utilization, and the cleaning mechanism is used for cleaning the filter net. According to the adsorption tower, through reasonable structural design, the utilization rate of an adsorbent can be greatly increased, and the adsorption effect can be improved.

Description

technical field [0001] The invention relates to an adsorption tower for preparing high-purity tungsten hexafluoride, belonging to the technical field of tungsten hexafluoride preparation. Background technique [0002] Tungsten hexafluoride is mainly used as a raw material for the metal tungsten chemical vapor deposition (CVD) process in the electronics industry. WF 6 WSi 2 Can be used as wiring material in large scale integration (LSI). With the improvement of the degree of precision of electronic industry products, WF as a raw material is also 6 The purity puts forward extremely high requirements. When the purity is required to reach more than 99.999%, the industrial product WF must be 6 Purification and purification are carried out to meet the needs of the semiconductor industry. [0003] The preparation of high-purity tungsten hexafluoride often needs to filter the metal impurities and HF contained in it. Currently, adsorption towers are generally used to adsorb HF in...

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Problems solved by technology

[0003] The preparation of high-purity tungsten hexafluoride often needs to filter the metal impurities and HF contained in it. Currently, adsorption towers are generally used to adsorb HF in tungsten hexafluoride, and the adsorbent particles filled in the adsorption tower are used to absorb and remove HF. At present, the utilization rate of the bottom of the adsorbent filled in the adsorption tower is much greater than that of the top, which affects the adsorption effect.

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