Large precise vibration isolation platform based on air springs

Abstract

The invention discloses a large precise vibration isolation platform based on air springs. The large precise vibration isolation platform comprises a vibration isolation laboratory space, a load platform 1, a vertical air spring vibration isolator 2, a horizontal air spring vibration isolator 3, a high-speed electromagnetic servo valve 6, a pneumatic system and a control system. A lower panel of the load platform is supported by the vertical air spring vibration isolator and the horizontal air spring vibration isolator in a vibration isolation manner; the vertical air spring vibration isolatoris responsible for positive stiffness static load and local passive vibration isolation of the platform; the horizontal air spring vibration isolator is responsible for negative stiffness adjustmentand active vibration isolation of the platform; the inherent frequency of the vibration isolation system is reduced through positive and negative stiffness adjustment, and meanwhile, a vertical air spring and the horizontal air spring vibration isolator are combined to form active and passive composite control; feedback sensors are separately arranged on the air spring vibration isolators and areused for detecting the pressure of air cavities of the air springs and the acceleration of corresponding positions of the load platform; and the control system comprises a controller, a power unit anda servo valve.

Description

technical field [0001] The invention relates to the technical field of precision vibration isolation, in particular to a large precision vibration isolation platform based on an air spring. Background technique [0002] With the development of advanced science and technology driven by nanotechnology, precision testing and micro-nano manufacturing and processing equipment are widely used in the fields of aerospace, optical electronics, precision machinery manufacturing and non-destructive testing. Precision equipment such as electron beam lithography, focused ion beam, and scanning probe microscope have outstanding performances in precision, vibration resistance, and dynamic stability. They are required to work in an ultra-quiet laboratory environment with low vibration and noise, so the equipment needs to be The foundation is precision vibration isolated. [0003] The disturbing vibration of the laboratory mainly includes foundation vibration, environmental vibration and in...

AI Technical Summary

Problems solved by technology

[0006] Patent Publication No. CN106763465A, the patent titled "A Six-DOF Active and Passive Damping Platform", uses a hydraulic servo cylinder system vibration damping platform, but it is not suitable for dust-free precision equipment laboratories that require environmental cleanliness

Images