Preparation method of pyroelectric sensitive element

Abstract

The invention relates to a method for preparing a pyroelectric sensitive element, comprising the steps of: (1) annealing the thinned pyroelectric crystal after cleaning; The upper and lower electrodes are plated on both sides of the pyroelectric crystal; (3) The vacuum evaporation process is used to coat the absorption layer on the upper electrode of the pyroelectric crystal by installing a graphic chemical device under the coating fixture. Bake for a preset time before the start and after the end; (4) After cooling down, take the piece through the air to get the specially designed patterned unit of the pyroelectric sensor of the present invention, which can improve the absorption efficiency; the upper and lower electrodes and The patterned absorbing layer all adopts the process method of vacuum thermal evaporation coating, the process control is simple, and it is suitable for the production process.

Description

technical field [0001] The invention relates to the technical field of pyroelectric detectors, in particular to a method for preparing pyroelectric sensitive elements. Background technique [0002] Uncooled pyroelectric infrared sensors have important military and commercial values, especially in fire protection, urban pipe corridors, petrochemical and other industries, which play an important or even irreplaceable role. The widespread application of the pyroelectric effect in sensor technology began in the 1970s. Today, pyroelectric detectors are popular thermal infrared detectors because of their simple structure, robustness and excellent performance. [0003] The core component of the pyroelectric detector is the pyroelectric sensitive element, which is a single crystal material with special properties. This single crystal is composed of oppositely charged units, for example, regularly arranged charged ions, the so-called crystal lattice. Among the 32 point groups desc...

AI Technical Summary

Problems solved by technology

However, it also has the shortcomings of low film firmness and difficult patterning, so it is mainly used for laboratory preparation and less for production process

[0006] In the research on the absorption layer of the pyroelectric infrared detector disclosed by Yang Jianming and others, it is mentioned that a solid gold black film layer can be achieved by heating and filling nitrogen, but the firmness in the actual production process is still not enough. In addition, it is directly plated on the surface of the crystal. The gold black absorbing layer is not conducive to the wire bonding process of the electrode in the subsequent actual production

Images