Production process method of electronic-grade hydrofluoric acid

Abstract

The invention relates to a production process method of electronic-grade hydrofluoric acid in the field of chemical production. The production process method comprises the following steps of: a, pretreatment; b, rectification; c, absorption; d, adjusting; e, precise filtering; and f, filling. A pretreatment process is set before anhydrous hydrofluoric acid enters a re-rectification process, the strong oxidizing property of a strong oxidizing agent in the pretreatment process is used, part of impurities contained in the hydrofluoric acid are oxidized into substances with higher valence states,therefore, the physical property is changed by changing the valence state, and removal in the subsequent re-rectification process is ensured, an intermediate product is filtered through a precision filter, tiny particle impurities contained in a finished product can be further removed, the purpose of arranging the filter is to ensure that some external influence factors in the production process are eliminated, so that the product quality standard can meet the UPS-level quality standard requirement, the UPS-level product achievement rate reaches 85% or above, and the product quality improvement is greatly guaranteed.

Description

Technical field [0001] The invention relates to the field of chemical production, and in particular to a production process of electronic grade hydrofluoric acid. Background technique [0002] With the development of my country's high-end semiconductors, especially the development of China's chip technology, the demand for electronic-grade hydrofluoric acid used in the cleaning and corrosion of integrated circuits (ICs) and very large-scale integrated circuits (VLSI) chips has been high. No less, and quality requirements are getting higher and higher with the development of the industry. As one of the key basic chemical materials in the production process of the microelectronics industry, the development of electronic-grade hydrofluoric acid in our country has only happened in recent years. It has been mainly limited by technology restrictions imposed by foreign monopolies. my country's electronic-grade hydrogen The quality of hydrofluoric acid has been lingering in the mid- ...

AI Technical Summary

Problems solved by technology

The electronic grade hydrofluoric acid that adopts this general method to make is basically in low-middle level (EL grade and UP grade), can't reach basically for middle and high-end market quality standard (UPS grade and UPSS grade)

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