Arch resonator for resonant MEMS sensor and MEMS accelerometer

Abstract

The invention discloses an arch resonator for a resonant MEMS sensor and an MEMS accelerometer. The arch resonator comprises an anchoring system and an arch resonance beam connected with the anchoringsystem. Thermal current used for adjusting the arch height is applied to the arch resonance beam through the anchoring system. Under the action of thermal current, the rigidity of the arch resonancebeam is regulated and controlled through thermal strain generated by the arch resonance beam, so that the rigidity of the arch resonance beam is crossed between in-phase modal frequency and reverse modal frequency, and then modal coupling or a working interval is regulated. The height of the arch beam of the resonator is changed, and the frequency difference between modes is increased due to the change of the arch height, so that the sensitivity is improved; meanwhile, modal coupling is generated on the arch structure through thermal current, and differential detection can be realized throughthe characteristic that one modal in the modal of the arch beam of the resonator is sensitive to stress and strain and the other modal is insensitive to stress and strain due to the change of the archheight.

Description

technical field [0001] The invention belongs to the technical field of resonators, and more specifically relates to an arch resonator and MEMS accelerometer facing a resonant MEMS sensor. Background technique [0002] The resonant beam structure is the most commonly used mechanical structure in systems such as resonant acceleration sensors, resonant pressure sensors, and resonant magnetic sensors. Taking the resonant acceleration sensor as an example, the previous technology used the axial stress change caused by inertial force (Zhao C, Pandit M, et al..Journal of Microelectrome-chanical Systems, 2019:1-3.), similar work also includes (Pandit M, Zhao C, et al.Journal of Microelectromechanical Systems, 2019, PP(99):1-8., etc.), or the change of the mass block displacement leads to the change of electrostatic stiffness (CN110040680A, CN110078014A), so that the resonant beam frequency change. Detection methods based on axial stress changes usually have good stability, but low...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the defects of the prior art, the object of the present invention is to provide an arched resonator for resonant MEMS sensors, aiming to solve the problems caused by the single-end fixed single-arched beam structure in the prior art resulting in linearity of lateral and axial strains. The problem of poor accuracy and low sensitivity

Images