Traceable in-situ micro-nano indentation test instrument and method under variable-temperature working condition

Abstract

The invention relates to a traceable in-situ micro-nano indentation test instrument and a traceable in-situ micro-nano indentation test method under a variable temperature working condition, and belongs to the technical field of precise instruments and material test. The macro-micro switching type mechanical loading module, the nano mechanical loading module and the press-in position optical positioning module are fixed on the gantry cross beam; the optical imaging axis of the optical microscopic in-situ observation / needle alignment module is coplanar with the loading axis of the nano mechanical loading module, the optical microscopic in-situ observation / needle alignment module and the function switching module are installed on the table top of the marble base, and the contact / atmosphere mixed temperature changing module is fixed to the function switching module. Modular design, a micro-nano indentation test instrument is used as a core; the multi-stage vacuum / atmosphere chamber, the press-in depth traceability calibration module and the multiple groups of optical microscopic imaging assemblies are combined to realize researches of press-in depth calibration under a variable temperature working condition, needle alignment of a nano mechanical loading micro-force sensor, accurate positioning of a press-in position, in-situ dynamic monitoring of micro-area mechanical properties and a damage mechanism of a test material in different dimensions and the like.

Description

technical field [0001] The invention relates to the technical field of precision instruments and material testing, in particular to an in-situ micro-nano indentation testing instrument and method that can be traced under variable temperature working conditions. It can be used to study the local mechanical properties of materials with different dimensions under variable temperature conditions, and provides a new technical means for revealing the mechanical properties and damage mechanisms of materials in micro-regions in service environments. Background technique [0002] Materials are the material basis of human civilization, and also the support and guide of all high-tech. In recent years, with the development of micromechanics and microelectronics technology and the continuous improvement of the synthesis and preparation process of new materials such as thin films and coating materials, their characteristic scales have become smaller and smaller. Traditional macroscopic te...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to provide a traceable in-situ micro-nano indentation test instrument and method under variable temperature conditions, so as to solve the problem of single dimension of the test object existing in the existing in-situ micro-nano indentation test technology under variable temperature conditions. Limitations such as uneven temperature loading and inaccurate indentation depth measurement

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