System and method for measuring interface microscopic interaction force under micron scale

Abstract

The invention discloses a measurement system and a measurement method for achieving interface microcosmic interaction force mechanism research under a micron scale, and the system comprises a sensingmodule, an optical sensing module, a demodulation optical path module, a signal conditioning module, an upper computer module, and a nano-scale precision micro-displacement driving module. According to the system, the measurement of the interface microscopic interaction force in the micron scale can be realized, so that the nanoscale sensitivity, resolution, larger linear measurement range and better stability are obtained; through the measurement system, measurement and research on the interface microscopic interaction force under the micron scale are realized, a force displacement curve of the microsphere head under the micron scale is obtained, and related action mechanisms and rules of the interface microscopic interaction force under the micron scale are disclosed; therefore, a theoretical basis and a technical guarantee are provided for improving the triggering and scanning precision of the micro-nano probe.

Description

technical field [0001] The invention relates to micro-nano measurement and interface micro-interaction force, more specifically, an interface micro-interaction force measurement system based on fiber Bragg grating micro-nano sensing measurement and a measurement method thereof. Background technique [0002] Micro-nano ultra-precision detection technology is an important guarantee for micro-device processing and assembly. Three-coordinate measuring machines are often used to precisely measure the three-dimensional dimensions of some micro-devices. In order to measure various micro-devices, a variety of micro-probes and nano-scale precision measurement systems with various sensing principles have been developed. However, when the diameter of the probe microsphere reaches the order of microns or even nanometers, the magnitude of the interface microscopic interaction force between the probe tip and the surface to be measured will be much larger than gravity, which occupies a dom...

AI Technical Summary

Problems solved by technology

[0003] At present, the research on the interface microscopic interaction force mainly revolves around the atomic force microscope (AFM). However, the radius of curvature of the probe tip of the AFM mostly ranges from a few nanometers to tens of nanometers, and the size of the interface microscopic interaction force ranges from nN to The pN level, the action area is within tens of nanometers, which can only explain the composition and mechanism of the microscopic interaction force of the probe microsphere at the interface at the nanometer scale, and most of the force measurement experiments using the atomic force microscope are only in a single effect. factor, it is not universally applicable, and there is a lack of measurement of the microscopic interaction force of the interface by the micron-scale microprobe system

Images