An electrically driven on-chip integrated erbium-doped waveguide amplifier and its preparation method

Abstract

The embodiments of the present invention provide an electrically driven on-chip integrated erbium-doped waveguide amplifier and a preparation method thereof, including: a silicon substrate, a DBR bottom mirror, an optical waveguide, a gain medium layer, a DBR top mirror, Bonding layer, Ⅲ‑V group pump layer, Ⅲ‑V group pump layer generates pump light through electroluminescence, and indirectly electrically drives the gain medium layer in the intersecting direction of signal light transmission to generate amplification, Ⅲ‑V group semiconductor The light source is integrated into the bonding layer by epitaxial growth or patch bonding; the DBR bottom mirror and the DBR top mirror form a DBR resonant cavity to improve the pump power in the gain medium layer; the optical waveguide and the gain medium layer form a hybrid Waveguide structure. The invention adopts the III-V group semiconductor laser as the pump to realize electroluminescence; the III-V group semiconductor laser is integrated into the optical waveguide amplifier by means of growth or patch bonding, the process is simple and the cost is low.

Description

technical field [0001] The invention relates to the technical field of optoelectronics, in particular to an electrically driven on-chip integrated erbium-doped waveguide amplifier and a preparation method thereof. Background technique [0002] In recent years, microelectronics technology has developed rapidly according to Moore's law and has gradually become a bottleneck. Based on microelectronics technology, silicon-based optoelectronics technology that integrates optoelectronic devices on a chip has attracted more and more attention. It gives full play to the advantages of mature microelectronic technology, high integration, low cost, and low price, as well as the advantages of fast transmission rate, large bandwidth, and strong anti-interference ability of optical communication, and plays an increasingly important role in the field of communication. . On-chip optoelectronic devices, such as modulators, detectors, wavelength division multiplexers, etc., have gradually mat...

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