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Thermopile type high temperature heat flow sensor and preparation method thereof

A technology of heat flow sensor and thermopile, which is applied to thermometers, instruments, thermometers, etc. that use electric/magnetic elements that are directly sensitive to heat, can solve problems such as poor high-temperature heat flow impact ability, poor structural stability, and long response time. Achieve the effect of simple structure, stable structure and fast response speed

Active Publication Date: 2021-12-14
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the prior art described above, the object of the present invention is to provide a thermopile type high-temperature heat flow sensor and its preparation method, which are used to solve the problems of complex structure, large volume, long response time, structural Poor stability, poor ability to withstand high-temperature heat flow impact, and inability to apply in ultra-high temperature environments

Method used

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  • Thermopile type high temperature heat flow sensor and preparation method thereof
  • Thermopile type high temperature heat flow sensor and preparation method thereof
  • Thermopile type high temperature heat flow sensor and preparation method thereof

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Embodiment 1

[0082] see figure 1 , the present invention provides a kind of preparation method of thermopile type high temperature heat flow sensor, the preparation method of described thermopile type high temperature heat flow sensor comprises the following steps:

[0083] 1) Provide the substrate;

[0084] 2) forming a composite dielectric film on the upper surface of the substrate, the composite dielectric film covering the upper surface of the substrate;

[0085] 3) forming a resistance block on the upper surface of the composite dielectric film;

[0086] 4) forming an insulating medium layer on the surface of the resistance block, and the insulating medium layer covers the resistance block;

[0087] 5) forming a lead hole in the insulating medium layer, the lead hole passing through the insulating medium layer along the thickness of the insulating medium layer to expose the resistance block;

[0088] 6) forming a metal layer on the insulating medium layer, the metal layer including...

Embodiment 2

[0139] read on Figure 13 to Figure 18 , the present invention also provides a thermopile type high temperature heat flow sensor, the thermopile type high temperature heat flow sensor includes: a substrate 10, a heat insulating cavity 101 is formed in the substrate 10, and the heat insulating cavity 101 is formed along the The thickness direction of the substrate 10 runs through the substrate 10; a composite dielectric film 11, the composite dielectric film 11 is located on the upper surface of the substrate 10 and covers the upper surface of the heat insulation cavity 101; a resistance block 12, the resistance block 12 is located on the upper surface of the composite dielectric film 11, and is located directly above the substrate 10 and directly above the heat insulation cavity 101; an insulating dielectric layer 13, the insulating dielectric layer 13 covers the surface of the resistance block 12; a metal layer 14, the metal layer 14 includes an electrode 141 and a lead 142, ...

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Abstract

The invention provides a thermopile type high-temperature heat flow sensor and a preparation method thereof. The thermopile type high-temperature heat flow sensor includes: a substrate in which a heat-insulating cavity is formed; a composite dielectric film located on the upper surface of the substrate and covering the insulation The upper surface of the thermal cavity; the resistance block, located on the upper surface of the composite dielectric film, and located directly above the substrate and directly above the heat insulation cavity; the insulating medium layer, covering the surface of the resistance block; the metal layer, including electrodes and lead wires, the electrodes are located on the upper surface of the insulating medium layer, the lead wires are located in the insulating medium layer, and the electrodes are electrically connected to the resistance block through the lead wires. The thermopile type high-temperature heat flow sensor of the present invention has a simple structure, and the number of thermocouple pairs is reduced to 1 to 2 pairs, which can withstand the impact of high-temperature heat flow, realize rapid and accurate measurement of heat flow density in high-temperature harsh environments, and work stably in high-temperature environments. Strong reliability.

Description

technical field [0001] The invention belongs to the technical field of heat flow detection, in particular to a thermopile type high-temperature heat flow sensor and a preparation method thereof. Background technique [0002] In nature and in the production process, there are a lot of heat transfer problems. With the development of modern science and technology, it is far from enough to only use temperature as the only information for heat transfer. Therefore, more and more attention has been paid to the theory and technology of heat flow detection, and the corresponding heat flow sensors have also been greatly developed and widely used. [0003] Although the existing heat flow sensors can meet the general measurement needs of heat flux in industrial and agricultural production and daily life, their response time is relatively long, usually on the order of tens of seconds or seconds. Therefore, in high-speed response occasions such as aviation and aerospace engines, it is d...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/02G01K7/22
CPCG01K7/028G01K7/226
Inventor 李铁王翊周宏田伟王跃林
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI