Cooling cover for reaction cavity of CVD coating equipment

Abstract

The invention relates to the technical field of coating of metal cutting tools and tools and molds, and discloses a cooling cover for a reaction cavity of CVD coating equipment. The cooling cover comprises a cylinder body, an air blowing channel, a bolt rod connecting rod operating handle, an external heat dissipation pore plate, a bolt rod connecting rod operating mechanism and a hoisting pore plate fixing beam are fixedly mounted on the outer side of the cylinder body correspondingly, and an air blowing inlet is fixedly formed in one side of the air blowing channel. According to the coolingcover for the reaction cavity of the CVD coating equipment, external heat radiation of the reaction cavity is partially blocked through the cooling cover cylinder body, so that the heat radiation on the surface of the reaction cavity can be prevented from being diffused to the outside to damage other surrounding objects; and the external heat dissipation pore plate of the cooling cover acceleratesthe cooling of the reaction cavity to a certain extent, and the cooling cover blows cold air to the outside of the reaction cavity through the air blowing channel and the air blowing inlet by means of an external air blower to cool the reaction cavity, so that the reaction cavity is quickly cooled, and the production efficiency is improved.

Description

technical field [0001] The invention relates to the technical field of metal cutting tools and mold coatings, in particular to a cooling cover for a reaction chamber of a CVD coating equipment. Background technique [0002] CVD is a method of forming a film on the surface of metal processing workpieces of other materials (substrates), such as molds, cutting tools, wear-resistant, corrosion-resistant parts, etc., especially the film formation method. The characteristic of chemical vapor deposition is that the reaction gas The chemical reaction of the compounds involved proceeds, the main product of the desired chemical reaction is deposited on the substrate surface and forms a coating or film there, possible reaction by-products appear in gaseous form and must be removed from the gas mixture In order to ensure the performance of the layer film, this is achieved through the exhaust pipeline. The service life of the coated cutting tools and tools will be greatly improved, and t...

AI Technical Summary

Problems solved by technology

[0003] In the existing technology, when the hoisting of the reaction chamber cavity is carried out by using the hook of the workshop crane to move the reaction chamber cavity, the workshop crane cannot accurately move to the top of the reaction chamber. The driving inertia is too large, the reaction chamber shakes relatively large, and before the heating cover is lifted, the high-temperature-resistant and heat-insulating aluminum foil needs to be artificially moved around the reaction chamber to block the heat radiation, which is inconvenient to operate

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