A coupled resonance surface acoustic wave microfluidic chip and manufacturing method thereof

A microfluidic chip, surface acoustic wave technology, applied in chemical instruments and methods, laboratory utensils, laboratory containers, etc., can solve the problem of piezoelectric substrate fragmentation, piezoelectric substrate heating, damage to microfluidic cavity particles Or cells and other problems, to achieve the effect of improving energy efficiency
CN112169852BActive Publication Date: 2021-06-22NANJING UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NANJING UNIV
Publication Date
2021-06-22

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Abstract

The invention discloses a coupled resonance surface acoustic wave microfluidic chip and a manufacturing method thereof, belonging to the technical field of microfluidic chips. The chip of the present invention includes a piezoelectric substrate, an interdigital transducer and a cavity top cover, a side wall is arranged between the piezoelectric substrate and the cavity top cover, and the piezoelectric substrate, the cavity top cover and the side wall enclose a fluid Mouth. The method of the present invention is as follows: select the material of the cavity top cover according to the piezoelectric substrate, then determine the thickness of the cavity top cover according to the working frequency and make the cavity top cover; calculate the fluid channel according to the piezoelectric substrate and the fluid in the fluid channel The cross-sectional width and cross-sectional height are selected, and the material of the side wall is selected according to the fluid in the fluid channel and the piezoelectric substrate to make the side wall; then the chip is manufactured according to the piezoelectric substrate, the cavity top cover and the side wall. The purpose of the present invention is to overcome the disadvantage of low energy of the surface acoustic wave microfluidic device in the prior art, and the present invention can improve the energy efficiency of the surface acoustic wave microfluidic chip.
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Description

technical field

[0001] The invention belongs to the technical field of microfluidic chips, and more specifically relates to a coupled resonant surface acoustic wave microfluidic chip and a manufacturing method thereof. Background technique

[0002] Surface acoustic wave is a kind of sound wave that propagates along the solid surface, its energy is mainly concentrated in the range of 1-2 wavelengths from the surface, and the displacement amplitude decays rapidly in the depth direction. Surface acoustic wave devices use interdigital transducers on the surface of piezoelectric materials to convert radio frequency signals into surface acoustic waves, which can be used as filters, oscillators and sensors, and have many applications in medical, military, industrial, communication and other fields. In recent years, surface acoustic wave technology has been widely used in the production of acoustic microfluidic chips, which can realize functions such as particle arrangement, cell so...

Claims

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