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Foreline for a vacuum pump

A technology of foreline pipelines and vacuum pumps, applied to components, pumps, pump components, etc. of pumping devices for elastic fluids, which can solve problems such as prolonging system downtime, emptying traps, and reducing conductivity

Pending Publication Date: 2021-01-05
EDWARDS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the reduced conductance of the foreline due to the inclusion of the branch reduces the pump performance
[0005] Furthermore, in the prior art it is often not possible to empty the trap during operation
Therefore, the entire vacuum system must be shut down in order to access and empty the trap, which causes interruptions in the semiconductor process and causes delays in maintenance intervals, thus prolonging system downtime

Method used

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  • Foreline for a vacuum pump
  • Foreline for a vacuum pump
  • Foreline for a vacuum pump

Examples

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Embodiment Construction

[0034] The foreline for a vacuum pump according to the invention comprises an inlet 10 adapted to be connectable eg to a container to be evacuated. Alternatively, the inlet 10 may be connected to another vacuum line or any vacuum device of any kind. Thus, the inlet 10 may comprise a vacuum flange for connection to its counterpart. The foreline also includes an outlet 12, which may also include a flange, wherein the outlet 12 is adapted to be connected to a vacuum pump. By means of a vacuum pump, the gaseous medium is conveyed from the inlet 10 of the foreline towards the outlet 12 of the foreline in order to establish or maintain a vacuum at the inlet 10 of the foreline.

[0035] According to the invention, the inlet 10 and the outlet 12 are arranged on a vertical axis 14 . In particular, the entire foreline is straight without any bends in order to improve the conductivity of the foreline, thereby enhancing the performance of the attached vacuum pump.

[0036] Such as fig...

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Abstract

A foreline for a vacuum pump with an inlet connectable to e.g. a vessel to be evacuated and an outlet connected to and inlet of the vacuum pump to evacuate the vessel. Thereby, the foreline further comprises a discharge line with a first end and a second end, wherein the first end comprises an opening and the second end comprises a solid material trap. The second end is arranged outside the foreline. The first end is arranged within the foreline between the inlet and the outlet and the opening is open towards the inlet of the foreline such that incoming solid material is collected by the opening, discharged through the discharge line and caught in the solid material trap.

Description

technical field [0001] The present invention relates to a backing line for a vacuum pump and a vacuum pump with the backing line. Background technique [0002] A foreline is a conduit or vacuum line with an inlet and an outlet. Thus, the inlet is connected to the vacuum container to be evacuated, to another conduit or to any other vacuum device of any kind. The outlet of the foreline is connected to the inlet of the vacuum pump, whereby the gaseous medium is conveyed from the inlet of the foreline to the outlet of the foreline by the vacuum pump, thereby establishing a vacuum at the inlet of the foreline. Since the foreline connects the vacuum unit to the inlet of the vacuum pump, a vacuum exists within the foreline. [0003] During semiconductor process operation, dust and solid process by-product materials are transferred to the vacuum pump by the process gas, which will eventually lead to damage of the vacuum pumping mechanism. In particular, dust and solid materials m...

Claims

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Application Information

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IPC IPC(8): F04B37/14F04B53/20
CPCF04B37/14F04B53/20C23C16/4412B01D45/02F04B53/10
Inventor N·康顿G·M·达姆斯P·米尔纳M·S·菲尔茨K·卡鲁拉斯
Owner EDWARDS LTD
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