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Array substrate and preparation method thereof and display panel

An array substrate, square technology, which is applied in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of small sub-threshold swing of driving thin film transistors, affecting the display effect of display panels, etc., to reduce the sub-threshold swing. amplitude, increasing subthreshold swing, and improving performance

Active Publication Date: 2021-01-22
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the existing array substrates cannot meet the above requirements at the same time, resulting in a small sub-threshold swing of the driving thin film transistor, which further affects the display effect of the display panel.

Method used

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  • Array substrate and preparation method thereof and display panel
  • Array substrate and preparation method thereof and display panel
  • Array substrate and preparation method thereof and display panel

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Embodiment Construction

[0055] The inventors of the present application have found in the actual work process that: when making an array substrate, the first active layer and the second active layer are usually formed on the substrate at intervals, and then a gate insulating layer is formed on the substrate. , the gate insulating layer is covered on the first active layer and the second active layer, and finally, the first gate and the second gate are arranged on the gate insulating layer, and the first gate and the second gate are respectively connected with The first active layer corresponds to the second active layer, wherein the first gate, the gate insulating layer and the first active layer form a switching thin film transistor, and the second gate, the gate insulating layer and the second active layer A driving thin film transistor is formed.

[0056]This will cause the gate insulating layer of the switching thin film transistor to have the same thickness as the gate insulating layer of the dr...

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Abstract

The invention provides an array substrate and a preparation method thereof, and a display panel, and relates to the technical field of display. The array substrate comprises a substrate, and a first active layer and a second active layer which are arranged on the substrate at an interval, wherein the substrate is provided with a first gate insulating layer covering the first active layer and the second active layer, the first gate insulating layer is provided with a first gate, a second gate insulating layer and a second gate are arranged on the first gate insulating layer in a stacked mode, and the first gate and the second gate are arranged at intervals and located on different layers. According to the invention, the first gate insulating layer and the second gate insulating layer are used as the gate insulating layer of a driving thin film transistor together, and the first gate insulating layer is used as the gate insulating layer of a switching transistor, so that the thickness ofthe gate insulating layer of the driving thin film transistor is greater than that of the gate insulating layer of the switching transistor, the sub-threshold swing of the switching thin film transistor can be reduced while the sub-threshold swing of the driving thin film transistor is increased, and the performance of the display panel is improved.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an array substrate, a preparation method thereof, and a display panel. Background technique [0002] OLED (Organic Light-Emitting Diode, organic light-emitting diode) display panel has the characteristics of self-illumination, high contrast, thin thickness, fast response speed, wide viewing angle, low power consumption, and flexible display, so it is widely used in display devices. In, for example, a smart watch or a smart bracelet. [0003] A display panel generally includes an array substrate and an OLED device disposed on the array substrate. The array substrate includes a substrate and a switching thin film transistor and a driving thin film transistor disposed on the substrate at intervals. During the use of the array substrate, the switching thin film transistor is required to have a lower sub-threshold swing, and the driving thin film transistor is also required ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/12H01L21/77H01L27/32
CPCH01L27/1214H01L27/1237H01L27/1259H10K59/12
Inventor 徐琳杜哲葛泳赵东方李洪瑞
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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