Electro-excited photonic crystal surface-emitting laser element with photodetection structure
A technology of photonic crystals and laser components, applied in electrical components, laser components, semiconductor lasers, etc., can solve problems such as inability to integrate each other, time-consuming adjustments, and inability to integrate surface-emitting lasers and automatic power control laser modules.
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[0049] First, see Figure 3A ~ Figure 3M As shown, the present invention provides a preferred embodiment of an electrically excited photonic crystal surface-emitting laser element (Electrically Pumped Photonic-Crystal Surface-Emitting Lasers) 10A with a photodetection structure, which extends the applicant's use of electrically excited photonic crystal surface Application number 16 / 008,223 filed by the U.S. Patent and Trademark Office, and the electro-excited photonic crystal surface-emitting laser element has been notified for approval and has not yet been published and announced, including: a substrate (substrate) 11, which has A first surface 111 and a second surface 112 on the opposite side. In this embodiment, the material of the substrate 11 can be selected from any of gallium nitride (GaN), gallium arsenide (GaAs), and indium phosphide (InP) formed, but not limited to.
[0050] A cladding layer (Cladding layer) 12 is located on the first surface 111 of the substrate 11...
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