Supercharge Your Innovation With Domain-Expert AI Agents!

Micro magnetic grid for manufacturing magnetic encoder by using magnetron sputtering method, and manufacturing method thereof

A magnetic encoder and magnetron sputtering technology, which is applied in sputtering coating, instruments, and conversion sensor output, etc., can solve the problems of reducing the service life of magnetic encoders, output signal defects, and unfavorable signal processing, etc., and achieve compact structure , solve the effect of low resolution and convenient machining

Pending Publication Date: 2021-02-02
NORTHEAST DIANLI UNIVERSITY
View PDF8 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The magnetic gratings for magnetic encoders described in the literature are large in size and low in resolution
At the same time, when the geometric size of the magnetic drum is fixed, when the number of magnetic poles written is increased, the output signal will have defects, which is not conducive to subsequent signal processing, and the manufacturing process in the literature is complicated and difficult to process. If the processing is not accurate, It will reduce the service life of the magnetic encoder

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Micro magnetic grid for manufacturing magnetic encoder by using magnetron sputtering method, and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0052] Such as figure 1Shown, a kind of miniature magnetic grid that makes magnetic encoder with magnetron sputtering method, design profile is disc shape, and the outer diameter of magnetic grid is 60mm, and internal diameter is 12mm, and the center is hole shape, and it comprises: substrate 1, Coating 2, grid 3, the shape of the substrate 1 is disc-shaped, with a round hole in the center, the material of the substrate 1 is monocrystalline silicon, and a coating is set on the ring of the outer surface of the substrate 1. Layer 2, the material of coating 2 is Co-Ni-P-La, and the material of coating 2 Co-Ni-P-La contains: 58.75% (weight percent) Co, 35.25% (weight percent) Ni, 5 % (percentage by weight) P, 1% (percentage by weight) La; a group of grids 3 are set on the coating 2, and the grids 3 are 32 pairs, the size of each magnetic grid is consistent, 360 ° circle The ring is equally divided; the number of magnetic grids determines the number of pulses output per revolution...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a micro magnetic grid for manufacturing a magnetic encoder by using a magnetron sputtering method. The micro magnetic grid comprises a substrate, a coating and grids, the magnetic grid is designed to be in a disc shape and a center hole shape and is convenient to install, the plurality of grids are arranged on the disc and covered with a layer of a magnetic material, the number of the magnetic grids determines the number of pulses output every time the magnetic grids rotate by a circle, and under the same condition, the larger the number of pulses is, the higher the resolution of an encoder is. The invention relates to a manufacturing method of the micro magnetic grid for manufacturing the magnetic encoder by using the magnetron sputtering method. The manufacturingmethod can increase the signal strength, increase the number of grids, improve the resolution ratio of the magnetic encoder, improve the precision and the size in a limited range, can be manufacturedas required, is compatible with a large-scale integrated circuit process, and can be integrally manufactured with an interface circuit.

Description

technical field [0001] The invention relates to the field of magnetron sputtering and the field of magnetic encoder modules, in particular to a micro-magnetic grid for a magnetic encoder manufactured by a magnetron sputtering method and a manufacturing method thereof. Background technique [0002] Rotary encoders are one of the essential components for motion control. The current research on rotary encoders mainly focuses on laser rotary encoders and magnetic rotary encoders. In terms of resolution, the resolution of the magnetic encoder depends on the number of bits of the magnetic drum; under the same conditions, the resolution of the optical encoder is higher than that of the magnetic encoder, because the laser grating can do finer. In the traditional method of making magnetic drums, magnetic drums cannot be made so detailed, so the resolution is lower than that of optical encoders, but optical encoders are not as strong as magnetic encoders in terms of anti-interference...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G01D5/245C23C14/35C23C14/54C23C14/16C22C19/07
CPCG01D5/245C23C14/35C23C14/54C23C14/165C22C19/07
Inventor 姜文娟生迪迪
Owner NORTHEAST DIANLI UNIVERSITY
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com