Method for achieving ultra-precise parallel linear microstructure machining through common machine tool

Abstract

The invention discloses a method for achieving ultra-precise parallel linear microstructure machining through a common machine tool, and belongs to the field of ultra-precise machining of error compensation. The method comprises the following steps: a piezoelectric actuating micro-displacement device provided with a workpiece is fixed to a workbench; an elliptical vibration auxiliary fly-cutting device and a displacement sensor are fixed to a lathe bed, and the displacement sensor can measure the moving error of the workbench by measuring a high-precision standard block fixed to the workbench;a feedback control system is optimized on the basis of improving the nonlinear response problem of piezoelectric actuation by a method of measuring the displacement of another piezoelectric actuationmicro-displacement device through the displacement sensor; and along with the movement of the workbench, when the elliptical vibration auxiliary fly-cutting device machines a linear microstructure onthe workpiece, the displacement sensor feeds back the measured moving error of the workbench to the piezoelectric actuating micro-displacement device in real time to drive the workpiece to make corresponding displacement compensation amount, so that the machining error is improved, and the ultra-precision machining of the parallel linear microstructure by the common machine tool is realized.

Description

technical field [0001] The invention belongs to the technical field of microstructure manufacturing, and relates to an ultra-precision machining method for error compensation. Background technique [0002] The microstructure functional surface enables the surface of the object to have some specific physical and chemical functions, and has broad application prospects in high-tech fields such as imaging, detection, and solar energy. For ultra-precision microstructures, such as line groove organization and microgroove structure composed of multi-intersecting linear arrays, prism substrates, pyramid substrates, special reflective coatings, microstructures of thin films, etc., due to the limitations of structural geometry and cutting tools Due to the limitation of processing trajectory, economical diamond flying cutting processing is generally used. However, ultra-precision machining of such microstructures can generally only be completed on ultra-precision milling machines, and...

AI Technical Summary

Problems solved by technology

However, for ordinary machine tools, when the minimum movement of their own reference components that can be controlled is much greater than the error that needs to be compensated, it is impossible to achieve ultra-precision machining of microstructures through this type of error compensation.

Images