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Pressure sensor based on thermopile principle

A technology of pressure sensor and thermopile, which is applied in the direction of fluid pressure measurement through thermal devices, fluid pressure measurement through electromagnetic elements, and fluid pressure measurement. It can solve the problems of large pressure sensor size and incapable of electrical output, and achieve process compatibility. The effect of flexible design and reduced size

Active Publication Date: 2021-02-26
NANJING GAOHUA TECH
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  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

The traditional pressure sensor is mainly based on mechanical structural devices, and the deformation of the elastic element is used to indicate the pressure. The pressure sensor of this structure is large in size and cannot be electrically output

Method used

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  • Pressure sensor based on thermopile principle
  • Pressure sensor based on thermopile principle

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Embodiment Construction

[0026] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, various implementation modes of the present invention will be described in detail below in conjunction with the accompanying drawings. However, those of ordinary skill in the art can understand that, in each implementation manner of the present invention, many technical details are provided for readers to better understand the present application. However, even without these technical details and various changes and modifications based on the following implementation modes, the technical solution claimed in this application can also be realized. The division of the following embodiments is for the convenience of description, and should not constitute any limitation to the specific implementation of the present invention, and the various embodiments can be combined and referred to each other on the premise of no contradiction.

[0027] see figure 1 , ...

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Abstract

The invention discloses a pressure sensor, which comprises a cavity film for sensing the pressure, a heating resistor, an air cavity, a thermopile, a radiator and a substrate; the cavity film for sensing pressure is positioned above the substrate, the thin air cavity is formed between the cavity film and the substrate, and the radiator is positioned on the upper surface of the substrate in the aircavity; the heating resistor is located above the air cavity on the upper surface of the cavity film, and the thermopile is arranged near the heating resistor. When no external pressure exists, current excitation is applied to the heating resistor, stable temperature distribution is formed near the heating resistor, and the thermopile placed near the heating resistor senses the temperature changeand outputs initial thermoelectric potential. And when the external pressure is increased, the cavity film deforms and is in contact with the radiator to form a radiating passage, so that the thermoelectric potential is reduced and the pressure is measured. Adjustment of the pressure detection range and sensitivity is achieved by changing the magnitude of applied current excitation, and the sensor has the advantages of being high in sensitivity, large in measurement range, flexible in design, simple in structure and the like.

Description

technical field [0001] The invention belongs to the technical field of microelectronic devices, and in particular relates to a pressure sensor based on the thermopile principle. Background technique [0002] Sensor technology is one of the core technologies of modern measurement and automation systems. Among various sensors, pressure sensors have the advantages of small size, light weight, high sensitivity, high stability, low cost, and easy integration, making pressure sensors a part of daily life. It is the most widely used sensor in industrial practice, and it is widely used in machinery manufacturing, intelligent building, aerospace, military defense, ocean development, water conservancy and hydropower, railway transportation, meteorology and geology, automobile industry, electronic communication, oil well, medical service and many other fields. Common pressure sensors can be divided into resistance strain gauge type, semiconductor strain gauge type, piezoresistive type...

Claims

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Application Information

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IPC IPC(8): G01L9/00G01L11/00G01L1/00
CPCG01L1/005G01L9/0051G01L11/002
Inventor 李维平兰之康
Owner NANJING GAOHUA TECH
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