Radio Frequency Inductively Coupled Plasma Superimposed Broadband Bandpass Frequency Selective Surface Structure
A technology of frequency selective surface and inductive coupling, which is applied in the field of active stealth, can solve the problems that the multi-frequency passband/stopband cannot be adjusted, and achieve the effect of increasing the range of incident angle, reducing reflection, and reducing insertion loss
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[0033] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0034] An embodiment of the present invention provides a radio frequency inductively coupled plasma superimposed broadband bandpass frequency selective surface structure, such as figure 1 As shown, it includes a plasma coupling frequency selective surface structure 1, and the plasma coupling frequency selective surface structure 1 includes a radio frequency inductively coupled plasma source 2, a broadband bandpass frequency selective surface 3 and a closed wave...
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