A thin film resistance strain pressure sensor and its layout optimization method

Abstract

The invention discloses a thin-film resistance strain pressure sensor and its layout optimization method. The thin-film resistance strain pressure sensor includes a film-shaped sensitive circuit arranged on a flat diaphragm, including four resistors R1 connected end to end to form a Wheatstone bridge. ~R4, resistance R1 and resistance R4 are formed by connecting n radial lines radially arranged in series with the center O of the circular deformation area of ​​the extension line passing through the flat diaphragm, and resistance R2 and resistance R3 are arranged around the center O The m tangential lines are connected in series end to end, and the resistors R1 and R4, R2 and R3 are arranged symmetrically with respect to the center O of the circle. The pressure sensor of the present invention can ensure that the sensitivity of the sensor meets the design requirements, and has strong anti-surge capability, good dynamic signal perception ability, and realizes accurate bridge balance; the layout optimization method of the present invention can fine-tune the layout to ensure that the layout meets the requirements of the electric current. bridge balance requirements.

Description

technical field [0001] The invention relates to thin film resistance strain pressure sensing technology, in particular to a thin film resistance strain pressure sensor and a layout optimization method thereof. Background technique [0002] Sensor technology, communication technology and computer technology constitute the three pillars of modern information. They respectively complete the information extraction, information transmission and information processing of the measured, which is an important part of the development of contemporary science and technology. The sensor converts environmental signals such as force, heat, light, magnetism, sound, and humidity into electrical signals for further analysis and processing. It is the main way and means to obtain information in the natural field and is the information source of the Internet of Things technology. . [0003] While sensor technology is widely used in important fields such as industrial automation, military defen...

AI Technical Summary

Problems solved by technology

However, in many existing layout schemes, the strain of the flat diaphragm is not reasonably analyzed and utilized, and the wiring of the resistance wire is unreasonable, resulting in low sensitivity of the sensor

At the same time, most of the transition connections between the resistance wires in the existing schemes use simple corners, but there are impedance mutations and parasitic capacitance and inductance at the corners, which will cause signal reflections when detecting dynamic signals, and lead to poor electromagnetic compatibility of the sensor chip. Good, poor resistance to ESD and surge current

Images