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Measuring device and method capable of dynamically measuring surface shape of planar optical element

An optical element, dynamic measurement technology, applied in the optical field, can solve the problems of poor real-time measurement, low measurement accuracy, small measurement dynamic range, etc., to achieve high-precision measurement, improve measurement efficiency, and achieve the effect of alignment

Inactive Publication Date: 2021-03-16
XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0006] In order to solve the technical problems of low measurement accuracy, small dynamic range of measurement and poor real-time performance of existing planar optical element surface shape measuring devices, the present invention proposes a measuring device and method capable of dynamically measuring the surface shape of planar optical elements

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  • Measuring device and method capable of dynamically measuring surface shape of planar optical element
  • Measuring device and method capable of dynamically measuring surface shape of planar optical element
  • Measuring device and method capable of dynamically measuring surface shape of planar optical element

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Embodiment Construction

[0060] The present invention will be further described below in conjunction with accompanying drawing.

[0061] Such as figure 1 As shown, the measuring device that can dynamically measure the surface shape of a planar optical element provided by the present invention includes a laser 1, a first beam splitter 2, a collimating objective lens 3, a second beam splitter 4, an attenuation plate 5, and a far-field aiming detector 6. Small hole 7 (aperture smaller than 1 mm), eyepiece 8, binary optical device 9, detector 10 and image data processing unit (not shown in the figure).

[0062] The first beam splitter 2 is arranged on the output optical path of the laser 1, the collimating objective lens 3 and the measured plane optical element 11 are arranged successively on the transmission optical path after the output beam of the laser is transmitted through the first beam splitter 2, and the second beam splitter 4, The attenuation plate 5 and the far-field aiming detector 6 are sequ...

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Abstract

In order to solve the technical problems of low measurement precision, small measurement dynamic range and poor measurement real-time performance of an existing planar optical element surface shape measurement device, the invention provides a measuring device and method capable of dynamically measuring the surface shape of a planar optical element. According to the invention, a laser, a spectroscope, a collimator objective, an attenuation plate, a far-field aiming detector, a small hole, an ocular lens, a binary optical device and a detector are utilized to realize dynamic high-resolution measurement of the surface shape of the measured plane optical element, and the measurement process is not influenced by the external environment; The far-field aiming detector is used for measuring inclination information of the measured planar optical element relative to light beams incident to the surface of the measured planar optical element in real time, so that high-precision alignment is realized, and subsequent high-precision measurement can be realized; and the adopted binary optical device is a micro-lens array or a mixed modulation grating, the corresponding measurement principles arethe Hartmann Shack principle and the transverse shearing interference principle respectively, and compared with a traditional phase shift interference method, the method has a larger measurement dynamic range.

Description

technical field [0001] The invention belongs to the field of optics, and relates to a device and a method for measuring the surface shape of a plane optical element, in particular to a device and a method for dynamically measuring the surface shape of a plane optical element. Background technique [0002] As the construction scale of high-power laser devices becomes larger and larger, the number of planar optical components used is increasing. The surface shape of the planar optical element will seriously affect the beam quality and beam focusing performance in the laser device. Therefore, the demand for dynamic measurement of the surface shape of planar optical components is increasingly urgent. [0003] Static phase-shifting interferometers driven by traditional piezoelectric ceramics (such as Zygo phase-shifting laser interferometers in the United States) are susceptible to air flow disturbance and vibration because they obtain the measured wavefront phase results by pha...

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Application Information

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IPC IPC(8): G01B11/24
CPCG01B11/24G01B11/2441
Inventor 段亚轩达争尚郑小霞董晓娜王拯洲张伟刚孙策蔺辉陈晓义范尧
Owner XI'AN INST OF OPTICS & FINE MECHANICS - CHINESE ACAD OF SCI
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