Measuring device and method capable of dynamically measuring surface shape of planar optical element
An optical element, dynamic measurement technology, applied in the optical field, can solve the problems of poor real-time measurement, low measurement accuracy, small measurement dynamic range, etc., to achieve high-precision measurement, improve measurement efficiency, and achieve the effect of alignment
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0060] The present invention will be further described below in conjunction with accompanying drawing.
[0061] Such as figure 1 As shown, the measuring device that can dynamically measure the surface shape of a planar optical element provided by the present invention includes a laser 1, a first beam splitter 2, a collimating objective lens 3, a second beam splitter 4, an attenuation plate 5, and a far-field aiming detector 6. Small hole 7 (aperture smaller than 1 mm), eyepiece 8, binary optical device 9, detector 10 and image data processing unit (not shown in the figure).
[0062] The first beam splitter 2 is arranged on the output optical path of the laser 1, the collimating objective lens 3 and the measured plane optical element 11 are arranged successively on the transmission optical path after the output beam of the laser is transmitted through the first beam splitter 2, and the second beam splitter 4, The attenuation plate 5 and the far-field aiming detector 6 are sequ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com