Measuring device and method capable of dynamically measuring surface shape of planar optical element

Abstract

In order to solve the technical problems of low measurement precision, small measurement dynamic range and poor measurement real-time performance of an existing planar optical element surface shape measurement device, the invention provides a measuring device and method capable of dynamically measuring the surface shape of a planar optical element. According to the invention, a laser, a spectroscope, a collimator objective, an attenuation plate, a far-field aiming detector, a small hole, an ocular lens, a binary optical device and a detector are utilized to realize dynamic high-resolution measurement of the surface shape of the measured plane optical element, and the measurement process is not influenced by the external environment; The far-field aiming detector is used for measuring inclination information of the measured planar optical element relative to light beams incident to the surface of the measured planar optical element in real time, so that high-precision alignment is realized, and subsequent high-precision measurement can be realized; and the adopted binary optical device is a micro-lens array or a mixed modulation grating, the corresponding measurement principles arethe Hartmann Shack principle and the transverse shearing interference principle respectively, and compared with a traditional phase shift interference method, the method has a larger measurement dynamic range.

Description

technical field

[0001] The invention belongs to the field of optics, and relates to a device and a method for measuring the surface shape of a plane optical element, in particular to a device and a method for dynamically measuring the surface shape of a plane optical element. Background technique

[0002] As the construction scale of high-power laser devices becomes larger and larger, the number of planar optical components used is increasing. The surface shape of the planar optical element will seriously affect the beam quality and beam focusing performance in the laser device. Therefore, the demand for dynamic measurement of the surface shape of planar optical components is increasingly urgent.

[0003] Static phase-shifting interferometers driven by traditional piezoelectric ceramics (such as Zygo phase-shifting laser interferometers in the United States) are susceptible to air flow disturbance and vibration because they obtain the measured wavefront phase results by pha...

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