Device for activating getter by radio frequency discharge plasma and enhancing adsorption rate of getter

Abstract

The invention relates to a device for activating a getter through radio frequency discharge plasma and increasing the adsorption rate of the getter. The device comprises a vacuum chamber, a radio frequency power supply system, a vacuumizing system assembly, an air supply system assembly and an air pressure acquisition system assembly. When the vacuum chamber obtains certain vacuum through vacuum system assemblies such as a ball valve and a mechanical pump, the gas type and the pressure intensity in the chamber are set through gas supply system assemblies such as a gas supply source and a massflow meter. When the hollow container with the built-in getter and the sealing flange are grounded and a radio frequency electric field is applied to generate plasma, the real-time change of the air pressure in the cavity is monitored through acquisition system components such as a vacuum gauge, a vacuum gauge display, a digital information acquisition card and a computer; the generated electromagnetic field and plasma effectively activate the getter and improve the getter rate.

Description

technical field [0001] The invention belongs to the field of electromagnetic and material applications, and in particular relates to a device for activating a getter by radio frequency discharge plasma and enhancing its adsorption rate. Background technique [0002] At present, industrial applications and basic scientific research in many fields need to be carried out in a vacuum environment, including coating, heat treatment, micro-electromechanical systems, surface science, atomic physics, nanotechnology and semiconductor industry. For vacuum technology, the internal vacuum environment and vacuum degree directly affect the working range and efficiency, especially after entering the 21st century, with the continuous improvement of various application indicators and the deepening of basic discipline research, its operation and research All environments require different degrees of high vacuum or even ultra-high vacuum to maintain, which also puts forward higher requirements ...

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Problems solved by technology

[0005] The present invention is made in view of the above facts, and mainly aims at the problems of low electricity and heat conversion efficiency in the activation process of traditional getters, long activation process time, slow adsorption rate of some gases after activation, etc., and its purpose is to provide a Device for activating getters and enhancing their adsorption rates with radio-frequency discharge plasma

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