A dual-channel quadrature phase-shift demodulation filtering mems gyroscope interference suppression method
An interference suppression and demodulation technology, applied in the direction of gyro effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., can solve the common mode noise protection effect, non-common mode interference protection effect is poor, and the protection effect cannot cover the sound wave frequency band and other problems, to achieve the effect of simplifying the structure, reducing the volume and reducing the manufacturing cost
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[0032] In the presence of acoustic interference, the effect of sound waves is equivalent to the effect of force. The motion of the MEMS gyroscope can be described by the dynamic equation:
[0033]
[0034] Among them, x is the displacement in the driving direction, representing the driving mode of the MEMS gyroscope, and y is the displacement in the sensing direction, representing the detection mode. with Represents the speed and acceleration in the driving and sensing directions, respectively. m x 、m y are the masses in the driving and sensing directions, respectively, D xx 、D yy is the damping coefficient, k xx 、k yy is the coefficient of elasticity. D. xy 、D yx Parameter introduced for non-proportional damping, k xy 、k yx Parameters introduced for anisoelasticity characterize the interplay of motion in both actuation and sensing directions. Ω(t) is the angular velocity, ω n is the acoustic frequency, F X , F Y are the external forces in the driving and ...
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