Super junction device and manufacturing method thereof

Abstract

The invention discloses a super junction structure, and the structure is formed above the surface of a first N-type epitaxial layer, the width of a P-type column at the top position of a super junction unit is smaller than that of an N-type column, and stepping is not changed; the N-type column is composed of a second N-type epitaxial layer filled in the grooves, the P-type column is composed of a first P-type epitaxial layer between the grooves, and the first P-type epitaxial layer is formed on the first N-type epitaxial layer; the groove penetrates through the first P-type epitaxial layer, and the bottom of the groove is in contact with the first N-type epitaxial layer; the total amount of P-type impurities in the P-type columns in the super junction units is matched with the total amount of N-type impurities in the N-type columns, and the doping concentration of the P-type columns is higher than that of the N-type columns. The invention further discloses a manufacturing method of the super junction device. According to the invention, the process control difficulty can be reduced, and the consistency of the device can be improved; when the grooves are inclined, the high-temperature on-resistance of the device can be reduced, the PN impurity difference between the top and the bottom of the super junction unit is reduced, and the breakdown voltage of the device is improved.

Description

technical field [0001] The invention relates to the field of manufacturing semiconductor integrated circuits, in particular to a super junction device; the invention also relates to a method for manufacturing the super junction device. Background technique [0002] A super junction structure is a structure of alternately arranged N-type pillars and P-type pillars, that is, PN pillars. If the superjunction structure is used to replace the N-type drift region in the vertical double-diffused MOS transistor (Vertical Double-diffused Metal-Oxide-Semiconductor, VDMOS) device, a conduction path is provided in the conduction state (only the N-type column provides a path, The P-type column is not provided), and bears the reverse bias voltage in the off state (the P and N columns are jointly borne), and a super-junction metal-oxide-semiconductor field-effect transistor (Metal-Oxide-Semiconductor Field-Effect Transistor, MOSFET) is formed. The super-junction MOSFET can greatly reduce ...

AI Technical Summary

Problems solved by technology

But in this way, in the manufacturing process, especially in the trench process, due to the small width of the P column, the difficulty of process control is increased, and at the same time, the concentration of filling impurities is increased, and because of the increase in the absolute value of the concentration, the same percentage of process Changes, the change of the total amount of impurities will increase, the degree of charge imbalance will be serious, and the deviation of device performance, including the deviation of breakdown voltage, will be large, affecting the consistency of the device

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