Damping-adjustable silicon micro tuning fork resonant accelerometer structure

Abstract

The invention discloses a damping-adjustable silicon micro tuning fork resonant accelerometer structure. An acceleration structure is arranged on a middle monocrystalline silicon piece of three-layer monocrystalline silicon, and the structure comprises a mass block, two resonators, four micro lever amplification mechanisms, a stress release mechanism, a plurality of supporting beams, a plurality of damping adjusting mechanisms and a plurality of fixed bases. The damping adjusting mechanisms are uniformly distributed on the mass block. The two resonators are symmetrically arranged in the middle of the mass block relative to the x axis, and the micro-lever amplification mechanism is located between the two resonators. One ends of the inner sides of the two resonators are connected with the output ends of two micro-levers respectively, and the fulcrum ends of the two micro-levers connected with the same resonator are connected to the same stress release mechanism and then connected with the corresponding fixed base. The input ends of the micro-lever mechanisms are connected with the mass block, the mass block is connected with the fixed bases through the supporting beams, and the fixed bases are connected with the fixed bases of the upper-layer monocrystalline silicon and the fixed bases of the lower-layer monocrystalline silicon. The temperature coefficient of the frequency is reduced, and the damping is adjustable.

Description

technical field [0001] The invention belongs to the technical field of micro-inertial sensors in MEMS, in particular to a damping-adjustable silicon micro-tuning fork resonant accelerometer structure. Background technique [0002] Silicon micro accelerometer is a typical MEMS inertial sensor. Its research began in the early 1970s, and there are various forms such as capacitive, piezoelectric, piezoresistive, thermal convection, tunnel current and resonance. The unique feature of the silicon microresonant accelerometer is that its output signal is a frequency signal, and its quasi-digital output can be directly used in complex digital circuits, which has high anti-interference ability and stability, and eliminates the need for other types of acceleration In order to avoid the inconvenience of signal transmission, it is directly connected to the digital processor. At present, the research of resonant accelerometer by Draper Laboratory in the United States is in the leading po...

AI Technical Summary

Problems solved by technology

When there is shock or vibration in the working environment of the silicon microresonant accelerometer, after the mass block is excited in the mode of the sensitive axis, the mass block will produce a large vibration displacement, resulting in a large output and even causing structural damage

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