Medical LED chip and preparation method thereof
A technology of LED chips and scintillation crystals, applied in the field of medical light sources, can solve the problems of short service life of LEDs, and achieve the effect of prolonging the service life
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Embodiment 1
[0055]Example 1 Medical LED chip (single-layer flash crystal layer)
[0056]In this embodiment, the scintillation crystal layer 91 is a LUAP: Ce film having a thickness of a layer of 600 nm using a single crystal rare earth silicon (aluminum) acid salt LUAP: Ce, a metal grid layer 92 is a metal silver, a gate line. The height is 450 nm, the spacing is 450 nm, the scintillation crystal layer 91 and the metal grid layer 92 are 1 layer. 1050
[0057]The preparation process of the medical LED chip in this embodiment is as follows:
[0058]S1: The substrate 1 is passed to the MOCVD device to ensure that the surface of the substrate is cleaned, and the nucleation layer 2 composed of AlN is grown on the substrate 1 under the conditions of the growth temperature of 550 ° C, pressure 500 torr;
[0059]S2: The non-doped layer 3 composed of GaN is grown on the nucleation layer 2 under the condition of 1080 ° C, the pressure is 200 Torr.
[0060]S3: Under the conditions of the growth temperature of 1090 ° C, ...
Embodiment 2
[0067]Example 2 Medical LED chip (single-layer flash crystal layer)
[0068]Compared with Example 1, the scintillation crystal layer 91 and the metal grid layer 92 in the present embodiment were two layers.
Embodiment 3
[0069]Example 3 Medical LED chip (single layer flash crystal layer)
[0070]Compared to Example 1, the scintillation crystal layer 91 and the metal grid layer 92 in the present embodiment were two layers, and the metal grid layer 92 is metal copper.
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Abstract
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