Workpiece frame of vacuum coating machine for large-length-diameter-ratio pipe for reactor and coating machine thereof
A vacuum coating machine, a technology of large aspect ratio, applied in vacuum evaporation coating, metal material coating process, sputtering coating and other directions, can solve the problems of insufficient uniformity, poor sealing, insufficient stability, etc. Achieving good coating effect and avoiding deformation
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Embodiment 1
[0052] The workpiece frame of the vacuum coating machine for large length-to-diameter ratio pipes for reactors, including revolution components and rotation components,
[0053] The revolving assembly includes a large turntable 38 and a large gear 37, the large turntable 38 and the large gear 37 are connected by a shaft, the large turntable 38 is located below the large gear 37,
[0054] The autorotation assembly includes a pinion 310 and an autorotation shaft 35 , the pinion 310 meshes with the large gear 37 , the autorotation shaft 35 is connected with the large turntable 38 , and a workpiece 33 is installed on the autorotation shaft 35 .
[0055] The large turntable 38 is connected with a second rotating part through a cylinder, the second rotating part is provided with a lower sleeve 36, and one end of the workpiece 33 is fixed on the rotation shaft 35 by a clamp 34, and the workpiece The other end of 33 extends into the lower casing 36 without touching the bottom of the l...
Embodiment 2
[0058] A reactor vacuum coating machine with a large length-to-diameter ratio includes a translation door 2, a vacuum chamber 1, an arc source and the above-mentioned workpiece frame 3, the arc source is arranged on the inner wall of the vacuum chamber 1, and the workpiece frame 3 is arranged on On the translation door 2, the translation door 2 and the vacuum chamber 1 are detachably connected.
[0059] The workpiece rack 3 is fixed on the top of the translation door 2 by the upper support 31 columns, and is fixed on the bottom of the door by the lower support 32 columns, wherein the upper support 31 columns bear the weight of the entire workpiece rack 3, and the lower support 32 columns do not bear force, only play the role of guide, and leave space for the thermal deformation of the workpiece holder 3 to prevent the workpiece holder 3 from being stuck at high temperature; It only plays the role of guiding and shielding; the large gear 37 is connected with the upper supportin...
Embodiment 3
[0067] The difference between this embodiment and Embodiment 1 is that the arc source includes a first arc source and a compensation arc source. The sources are located at the bottom and top of the first arc source.
[0068] The first arc source is in four columns, and each column has eight arc sources. From the first column to the fourth column, the position of the first arc source at the top gradually decreases, and the bottom of the first arc source in the first column is set There is a first compensation arc source 41, and a second compensation arc source 42 is arranged on the top of the first arc source in the fourth row, and the positions of the first compensation arc source 41 and the second compensation arc source 42 are adjustable.
[0069] The arc source of this structure is beneficial to ensure the uniformity of the coating, and the compensation arc source is beneficial to ensure the uniformity of the coating at both ends and the middle part of the workpiece 33, and...
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