Thickness evaluation method for strip-shaped target material assembly

Abstract

The invention relates to a thickness evaluation method for a strip-shaped target material assembly. The method comprises the steps of carrying out thickness measurement of a sputtering surface test site of the strip-shaped target material assembly through employing an ultrasonic thickness gauge, and determining that the strip-shaped target material assembly is qualified if the thickness value of each test site is greater than or equal to a preset value, wherein the test sites are distributed on straight lines parallel to the long side of the target material along the strip-shaped target material, the straight lines extend from one wide side to the other wide side, the number of the straight lines is at least three, and 5-8 detection points are distributed on each straight line. According to the thickness evaluation method provided by the invention, the thickness of the strip-shaped target material assembly is accurately controlled by selecting the proper number of the sites, measuring the thickness of the target at the specific test point and comparing the thickness with the preset value, so that the target can be prevented from being punctured in the sputtering process, the working efficiency in the sputtering process is remarkably improved, and the yield of products can be effectively improved.

Description

technical field [0001] The invention relates to the field of target materials, in particular to a method for evaluating the thickness of strip-shaped target material components. Background technique [0002] The target is used as the sputtering source of sputtering coating, and there are many kinds of commonly used targets, such as titanium target, aluminum target and molybdenum target. The common strip target is the main strip molybdenum target. [0003] For example, CN108950494A discloses a method for making elongated molybdenum targets, which includes the following steps: mixing materials, cold isostatic pressing, sintering, hot rolling, annealing, cutting, and machining to obtain multiple elongated molybdenum targets. The manufacturing method of the elongated molybdenum target material of the present invention adopts the method of increasing the single weight of the billet, hot-rolling a large plate at one time, and then dividing it into multiple elongated molybdenum ta...

AI Technical Summary

Problems solved by technology

[0005] During the sputtering process, the target has very high requirements on the thickness and size. However, since the target component is welded by two parts, the target and the back plate, the turning thickness cannot be identified from the size, and it is difficult to control. More or less, it will affect the sputtering effect of the product in the chamber

[0006] However, at this stage, the thickness of the bar-shaped target assembly is only roughly judged by measuring the thickness of the target and the back plate before welding and the processing amount during the welding process to roughly judge the thickness of the target, and it is impossible to accurately measure or determine the thickness of the target. At the same time, due to the particularity of the shape of the bar-shaped molybdenum target, it is not suitable to use the original thickness test method, and it is impossible to prevent the breakdown of the target during the sputtering process due to the unqualified target thickness, and then use the back plate as the target for sputtering radiation, causing irreversible damage to the product and affecting production efficiency