Subsurface imaging device

Abstract

The invention discloses a sub-surface imaging device and is used for imaging a to-be-imaged piece with a first surface and a second surface which are arranged back to back and separated from each other. The imaging device comprises a light source assembly, wherein the light source assembly is suitable for generating illumination light, the illumination light at least has a preset divergence angle in a divergence surface, the divergence surface is perpendicular to at least one of the first surface or the second surface; the illumination light is coupled into the to-be-imaged part to form waveguide light, and the waveguide light is propagated between the first surface and the second surface in a guided wave mode; and the waveguide light is scattered by a target object in the to-be-imaged piece and then is collected for imaging. According to the imaging device, the waveguide light is used for imaging, light intensity can be improved, the imaging effect is improved, imaging difficulty is reduced, and the formed waveguide light can realize multi-angle and large-area imaging, so imaging difficulty is reduced, and the imaging speed and efficiency are improved.

Description

technical field [0001] The invention relates to the field of imaging, in particular to a subsurface imaging device. Background technique [0002] Large-scale high-power laser devices such as the National Ignition Device of the United States, the megajoule laser device of France, and the Shenguang series devices of China usually require the use of a certain number of large-aperture optical components. Defects of optical components not only affect its long-term stability, coating quality and surface shape accuracy, but also directly reduce the laser damage threshold of the optical system, affecting its beam quality and service life. Subsurface imaging of optical components, especially for the characterization of subsurface defects, is particularly important for the effective detection of defects in optical components. [0003] The current characterization methods of subsurface defects can be divided into two categories: destructive detection methods and nondestructive detecti...

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Problems solved by technology

[0005] However, the existing devices that use the principle of total internal reflection to realize subsurface imaging often have the problems of difficult imaging, slow speed, and low efficiency.

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