Electro-optic crystal thin film for electro-optic modulator, preparation method and electronic components

Abstract

The application discloses an electro-optic crystal thin film for an electro-optic modulator, a preparation method and electronic components. A target groove array is prepared on an SOI substrate laminated with an electrode layer; the electro-optic crystal substrate is ion-implanted and cut into Electro-optic crystal slicing; transferring each electro-optic crystal slice to the corresponding groove in the target groove array, and bonding with the substrate layer in the corresponding groove in the target groove array to obtain a bonded body; performing the bonding on the bonded body Heat treatment to obtain electro-optic crystal thin film. In this application, the electro-optic crystal thin film layer retained in each groove forms an optical waveguide structure, and the optical signal of the optical waveguide is controlled through the grooves formed by the electrodes, thereby realizing the electro-optical modulation function. At the same time, this application uses SOI as the substrate, and uses the characteristics of the smooth surface between the layers of the SOI substrate itself, and combines the wet etching method to etch away the oxide layer in the corresponding area, so as to obtain the substrate layer that meets the needs of direct bonding. surface.

Description

technical field [0001] The application belongs to the technical field of semiconductors, and in particular relates to an electro-optic crystal thin film used for an electro-optic modulator, a preparation method and electronic components. Background technique [0002] Electro-optic crystal materials such as lithium niobate or lithium tantalate are widely used in nonlinear optics, ferroelectricity, and piezoelectricity due to their advantages such as high Curie temperature, strong spontaneous polarization, high electromechanical coupling coefficient, and excellent electro-optic effect. , electro-optic and other fields, especially in the fields of thin-film bulk acoustic wave devices, filters, electro-optic modulators, etc., have received more and more attention and applications. If electro-optic modulators are prepared using electro-optic crystal materials such as lithium niobate or lithium tantalate, it is necessary to further prepare the lithium niobate film into the require...

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Problems solved by technology

[0005] In order to solve the technical problem in the prior art that etching the optical waveguide on the thin film layer will cause certain damage to the thin film layer, thereby affecting the performance of the applied electronic device, this application provides an electro-optical modulator Electro-optic crystal film, preparation method and electronic component

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