Image quality compensation device and method, and optical imaging system
A technology of an optical imaging system and a compensation device, which is used in optics, photolithography process exposure devices, opto-mechanical equipment, etc., can solve the problems of complex device structure, small compensation range, poor stability, etc., to ensure imaging quality, realize compensation, The effect of improving accuracy
Inactive Publication Date: 2021-06-29
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
View PDF4 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0012] The purpose of the present invention is to provide an image quality compensation device, method and optical imaging system, which can solve one or more of the problems existing in the existing image quality compensation methods such as complex device structure, high cost, small compensation range, and poor stability. indivual
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0054] The following is attached Figures 1 to 11 and Specific Embodiments The image quality compensation device, method and optical imaging system proposed by the present invention will be further described in detail. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and all use imprecise scales, which are only used to facilitate and clearly assist the purpose of illustrating the embodiments of the present invention. In order to make the objects, features and advantages of the present invention more comprehensible, please refer to the accompanying drawings. It should be noted that the structures, proportions, sizes, etc. shown in the drawings attached to this specification are only used to match the content disclosed in the specification, for those who are familiar with this technology to understand and read, and are not used to limit the implementation o...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| wavelength | aaaaa | aaaaa |
Login to View More
Abstract
The invention provides an image quality compensation device and method, and an optical imaging system. The image quality compensation device comprises an image quality detection mechanism, a processor, at least one compensation lens and at least one angle control mechanism, the image quality detection mechanism is connected with the processor, and the compensation lens is connected with the angle control mechanism; the image quality detection mechanism is used for detecting image quality data of the optical imaging system and transmitting the image quality data to the processor; the processor is used for calculating the angle adjustment amount of the compensation lens according to the acquired image quality data; and the angle control mechanism is used for enabling the compensation lens to rotate by a corresponding angle according to the angle adjustment amount so as to change the surface type of the compensation lens and further realize image quality compensation. The device is simple in structure and low in assembly difficulty, the compensation lens can rotate by 360 DEG to carry out image quality compensation, adjustment is easy, the stability and reliability of image quality compensation are effectively improved, and the imaging quality is guaranteed.
Description
technical field [0001] The invention relates to the technical field of semiconductor integrated circuit manufacturing, in particular to an image quality compensation device, method and optical imaging system. Background technique [0002] At present, in the field of semiconductor packaging technology, semiconductor manufacturing and packaging integration technology are developing rapidly. The lithography projection objective lens used to manufacture integrated circuit chips usually needs to have higher resolution and image square numerical aperture (NA) to meet the needs of highly integrated chips. preparation. Along with this, the demand for the image quality of the projection optical system is getting higher and higher, and the optical imaging system for projection exposure is required to have a good image quality compensation capability to meet the image quality requirements of the exposure area during chip preparation. In addition, with the continuous improvement of lit...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20
CPCG03F7/70433G03F7/706G03F7/70483
Inventor 王进霞侯宝路丁杨建孙俊阳
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD