Disilane preparation equipment and disilane preparation method
A technology of disilane and equipment is applied in the field of preparation equipment and preparation of disilane, and can solve the problems of low industrial application value and low conversion rate, etc.
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[0039] Embodiments of the invention are described in detail below, examples of which are illustrated in the accompanying drawings. The embodiments described below by referring to the figures are exemplary and are intended to explain the present invention and should not be construed as limiting the present invention.
[0040] A disilane production apparatus 1000 according to an embodiment of the present invention will be described below with reference to the accompanying drawings. Such as Figure 1 to Figure 3 As shown, the disilane production equipment 1000 according to the embodiment of the present invention includes a heating device 100 , a catalytic dehydrogenation reactor 200 , a cryogenic device 300 , a light removal separation tower 400 , an adsorption device 500 and a weight removal separation tower 600 .
[0041] The heating device 100 has a first air inlet 110 and a first air outlet 120 . The catalytic dehydrogenation reactor 200 has a second gas inlet 210 and a sec...
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