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Layered body and electronic component

A technology of laminated body and surface layer, which is applied in the manufacture of electronic equipment, electrical components, multilayer circuits, etc., can solve the problems of lower strength and lower insulation reliability, and achieve the effect of high chemical durability

Active Publication Date: 2021-07-23
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If subjected to erosion during these processes, there will be problems such as a decrease in strength due to cracks or a decrease in insulation reliability.

Method used

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  • Layered body and electronic component
  • Layered body and electronic component
  • Layered body and electronic component

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0130] [Example 1: Formation of the surface layer of the constrained layer]

[0131] Making the inorganic ingredient by Al 2 O 3 The composed glass ceramic green sheet is laminated to the most surface layer of laminate as a constrained layer, and is firing. The reaction layer of the thickness μm of the surface residual thickness of the laminated body.

[0132] Determination of the distance from the surface of the laminated body by SIMS (secondary ion mass spectrometry) 2 O 3 The content. The AL of the reaction layer is confirmed by the inner layer.2 O 3 Multiple content, Al 2 O 3 The content increases from the inner layer to the surface of the laminated body.

[0133] figure 2 It is the alternation of the laminate of Example 1 2 O 3 The content of the distance from the surface of the laminated body is compared to the surface of the laminated body.

Embodiment 2～4

[0134] [Example 2 to 4: formation of surface layers based on other methods]

[0135] In Example 2, the surface laminated in the surface of the laminated billet is laminated in the glass in the glass. 2 O 3 A glass ceramic green sheet having a thickness of 2 μm in a staged stage of content and is fired under standard conditions.

[0136] In this case, becomes Al 2 O 3 The content of the ladder is laminated from the surface layer portion.

[0137] In Example 3, the surface laminated on the layer of laminate 2 O 3 A glass ceramic green sheet having a thickness of 5 μm is increased by the amount of the filler and firing under standard conditions.

[0138] In this case, becomes from making Al 2 O 3 The glass ceramic layer of the glass ceramic green sheet of the filler is a laminate of the surface layer.

[0139] In Example 4, after the laminate was produced under standard conditions, the thickness of 2 μm was physically applied to the surface of the laminated body. 2 O 3 membrane.

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Abstract

This layered body is a layered body in which a plurality of glass ceramic layers including: glass including SiO2, B2O3, Al2O3, and M2O (where M is an alkali metal); and quartz are layered, wherein the Al2O3 content of a surface section of the layered body is greater than the Al2O3 content of an inner layer section, and the M2O content of the surface section is less than the M2O content of the inner layer section.

Description

Technical field [0001] The present invention relates to laminate and electronic components. Background technique [0002] As an electronic component, a laminate having a multilayer glass ceramic layer is known. [0003] In Patent Document 1 discloses a temperature firing at 1000 ° C or lower, and can be used as a medium having a low relative dielectric constant and low dielectric loss using a high frequency circuit component. The dielectric material is characterized in that the mass percentage is 50 to 90% and SiO. 2 The filler consists of 10 to 50%, wherein the borosilicate glass contains 70 to 85% SiO in an oxide converter. 2 10 ~ 25% B 2 O 3 , 0.5 ~ 5% K 2 O, 0.01 ~ 1% of Al 2 O 3 , The above SIO 2 The filler is selected from the group consisting of more than one or more of α-quartz, α-square quartz, β-squamna. [0004] A laminated body having a high strength and low dielectric constant is disclosed in Patent Document 2. The laminate is characterized in that the laminated body...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/16B32B17/06C04B35/00H05K3/46
CPCC03C3/091C03C8/20C03C8/02B32B17/06H05K1/162H05K1/165H05K3/4629H05K1/181B32B18/00B32B37/06B32B2305/77B32B2307/732B32B2315/02B32B2457/08H05K1/0306H05K1/115H05K2201/10015H05K2201/1003H05K2201/1006
Inventor 千秋裕杉本安隆坂本祯章
Owner MURATA MFG CO LTD