Confocal focus fixing device of optical lens spacing measurement system
A measurement system and optical lens technology, applied in the field of optical measurement, can solve the problems of focusing lens adjustment, low signal-to-noise ratio, etc., and achieve the effects of improving energy utilization, simple operation, and easy realization
Active Publication Date: 2021-08-03
SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI
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Problems solved by technology
However, when the device measures a large-range multi-lens lens, there is no way to accurately adjust the focus of the focusing lens to the mirror surface to be tested, which leads to a low signal-to-noise ratio when the system performs complex lens tests, requiring repeated debugging In order to find the ideal spot focus position
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[0023] The present invention will be further described in detail below in conjunction with the embodiments, so that those skilled in the art can implement it with reference to the description.
[0024] It should be understood that terms such as "having", "comprising" and "including" used herein do not exclude the presence or addition of one or more other elements or combinations thereof.
[0025] Such as figure 1 As shown, a confocal fixed-focus device 6 of an optical lens spacing measurement system of the present embodiment, the optical lens spacing measurement system includes a low-coherence swept frequency light source 1, a coupler 2, a reference arm 3, a first detector 5 and The first collimator 4, the confocal focusing device 6 includes a small hole mirror 60, a focusing lens 61, a focusing lens 62, a pinhole plate 63 and a second detector 64;
[0026] The light emitted by the low-coherence sweeping light source 1 passes through the coupler 2 and is divided into sample l...
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The invention discloses a confocal focus fixing device of an optical lens spacing measurement system. The optical lens spacing measurement system comprises a low-coherence sweep frequency light source, a coupler, a reference arm, a first detector and a first collimator, and the confocal focus fixing device comprises a pinhole reflector, a focusing lens, a focusing lens, a pinhole plate and a second detector. According to the invention, non-focusing energy is shielded by the pinhole plate arranged at the focus of the focusing lens, confocal detection is formed, and whether the focus of the focusing lens is exactly focused on the mirror surface to be detected or not can be determined according to the energy signal detected by the second detector, so that focus fixing of the focusing lens can be realized, the operation is simple and convenient, and the implementation is easy; and according to the invention, light energy, which cannot enter the first collimator, of the measurement system is utilized through the small-hole reflector, so that the energy utilization rate of the measurement system is improved.
Description
technical field [0001] The invention relates to the technical field of optical measurement, in particular to a confocal fixed-focus device of an optical lens distance measurement system. Background technique [0002] The tactile measurement of optical spacing by using the principle of optical coherence tomography (SSOCT) has been widely used due to its advantages of non-contact and high measurement accuracy. Problems limit the scope of application of this type of measurement system. For example, patent 201810447356.8 discloses a non-contact measurement device and method for optical surface spacing, which uses the principle of swept optical coherence tomography (SSOCT) to perform non-contact measurement of optical spacing, and the depth of a single measurement can reach tens of millimeters. Most of the optical systems can complete simultaneous measurement of multiple optical surfaces at one time, and carry out segmented measurement with the movement of the reference arm to a...
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Login to View More IPC IPC(8): G01B11/14G01M11/02
CPCG01B11/14G01M11/0221
Inventor 邢利娜高峰何益陈一巍张欣史国华
Owner SUZHOU INST OF BIOMEDICAL ENG & TECH CHINESE ACADEMY OF SCI